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Conformal Polymer CVD | part of CVD Polymers: Fabrication of Organic Surfaces and Devices | Wiley Semiconductors books | IEEE Xplore

Conformal Polymer CVD

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Chapter Abstract:

Summary This chapter discusses the fundamental physical mechanisms that govern the conformality of polymer chemical vapor deposition (CVD) coatings, and reviews relevant ...Show More

Chapter Abstract:

Summary

This chapter discusses the fundamental physical mechanisms that govern the conformality of polymer chemical vapor deposition (CVD) coatings, and reviews relevant experimental evidence. It presents several examples of new applications enabled by conformal CVD polymer coatings. The chapter then focuses on initiated CVD (iCVD) films, as their conformality has been given considerable analytical attention. In polymer CVD, conformal coatings result when vapor‐phase reactants transport evenly to all surfaces of the substrate. This transport occurs in competition with the surface reaction and conformality is achieved when surface reaction rate is lower than the gas diffusion rate, a concept embodied by the Thiele modulus. For reaction and diffusion in a pore, the Thiele modulus depends on the sticking probability of the reactant and the aspect ratio of the pore. A number of chemical and physical factors have been found to control the sticking probability, which is quantitatively estimated based on reaction‐diffusion models.

Page(s): 87 - 109
Copyright Year: 2015
Edition: 1
ISBN Information:
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