Abstract:
This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal re...Show MoreMetadata
Abstract:
This paper reports the generation and evolution mechanisms of phononic frequency combs by a nonlinear modal-coupling MEMS resonator that can form one-to-three internal resonance. Through proper frequency sweeping, phenomena of frequency locking and internal resonance are first observed on the amplitude-frequency curve. The phononic frequency combs’ generation region is then confirmed to locate exactly at the strongest internal resonance region, and its turn-on procedure and conditions are carefully presented. Both forward and reverse frequency sweeps are used to demonstrate the multistage evolution of phononic frequency combs, showing comprehensive nonlinear dynamics including chaos, period-doubling bifurcation, and cyclic-fold bifurcation. These rich bifurcations allow a wide tunability in comb tooth spacing, which evolves from 25 Hz to more than 200 Hz, reaching an order of magnitude. [2024-0013]
Published in: Journal of Microelectromechanical Systems ( Volume: 33, Issue: 3, June 2024)
Funding Agency:
University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Jiahao Wu received the bachelor’s degree in mechanical engineering from the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, in 2021, where he is currently pursuing the Ph.D. degree. His research interests include nonlinear dynamics in MEMS resonators, with a focus on the theory and experiment of phononic frequency combs.
Jiahao Wu received the bachelor’s degree in mechanical engineering from the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, in 2021, where he is currently pursuing the Ph.D. degree. His research interests include nonlinear dynamics in MEMS resonators, with a focus on the theory and experiment of phononic frequency combs.View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Penghui Song received the bachelor’s degree from Xi’an Jiaotong University. He is currently pursuing the Ph.D. degree with the School of Mechanical Engineering, Shanghai Jiao Tong University. His research interests include nonlinear dynamics and MEMS, including computational methods for strongly nonlinear systems and the realization and dynamics of mechanical frequency combs.
Penghui Song received the bachelor’s degree from Xi’an Jiaotong University. He is currently pursuing the Ph.D. degree with the School of Mechanical Engineering, Shanghai Jiao Tong University. His research interests include nonlinear dynamics and MEMS, including computational methods for strongly nonlinear systems and the realization and dynamics of mechanical frequency combs.View more
University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Shuke Zang received the bachelor’s degree in mechanical engineering from Shandong University in 2022. She is currently pursuing the M.Sc. degree in mechanical engineering with Shanghai Jiao Tong University. Her research interests include MEMS, dynamics and control, and motion metrology methods.
Shuke Zang received the bachelor’s degree in mechanical engineering from Shandong University in 2022. She is currently pursuing the M.Sc. degree in mechanical engineering with Shanghai Jiao Tong University. Her research interests include MEMS, dynamics and control, and motion metrology methods.View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Yan Qiao received the M.S. and Ph.D. degrees in mathematics from Northwestern Polytechnical University, China, in 2017 and 2021, respectively. She is currently a Post-Doctoral Fellow with the School of Mechanical Engineering, Shanghai Jiao Tong University. Her research interests include the design, analysis, and implementation of resonant micro/nanoelectromechanical systems for use in inertial sensing, the stochastic, and...Show More
Yan Qiao received the M.S. and Ph.D. degrees in mathematics from Northwestern Polytechnical University, China, in 2017 and 2021, respectively. She is currently a Post-Doctoral Fellow with the School of Mechanical Engineering, Shanghai Jiao Tong University. Her research interests include the design, analysis, and implementation of resonant micro/nanoelectromechanical systems for use in inertial sensing, the stochastic, and...View more
Department of Mechanics, Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou, China
Ronghua Huan received the B.S. and Ph.D. degrees in engineering mechanics from Zhejiang University in 2002 and 2007, respectively. He was selected for Xinxing Program in 2012 and worked with the University of California at Berkeley and the University of California at Merced as a Visiting Professor. He is currently a Professor with Zhejiang University. He has published more than 100 peer-reviewed articles. His current rese...Show More
Ronghua Huan received the B.S. and Ph.D. degrees in engineering mechanics from Zhejiang University in 2002 and 2007, respectively. He was selected for Xinxing Program in 2012 and worked with the University of California at Berkeley and the University of California at Merced as a Visiting Professor. He is currently a Professor with Zhejiang University. He has published more than 100 peer-reviewed articles. His current rese...View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Wenming Zhang received the B.S. degree in mechanical engineering and the M.S. degree in mechanical design and theories from Southern Yangtze University, Wuxi, China, in 2000 and 2003, respectively, and the Ph.D. degree in mechanical engineering from Shanghai Jiao Tong University, Shanghai, China, in 2006. He is currently a Distinguished Professor with the State Key Laboratory of Mechanical System and Vibration, School of ...Show More
Wenming Zhang received the B.S. degree in mechanical engineering and the M.S. degree in mechanical design and theories from Southern Yangtze University, Wuxi, China, in 2000 and 2003, respectively, and the Ph.D. degree in mechanical engineering from Shanghai Jiao Tong University, Shanghai, China, in 2006. He is currently a Distinguished Professor with the State Key Laboratory of Mechanical System and Vibration, School of ...View more
University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Lei Shao (Member, IEEE) received the B.S. degree in mechanical engineering from Shanghai Jiao Tong University, China, in 2009, and the Ph.D. degree in mechanical engineering from the University of Michigan in 2014. He is currently an Associate Professor with the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University. His research interests include MEMS sensors and actuators, dy...Show More
Lei Shao (Member, IEEE) received the B.S. degree in mechanical engineering from Shanghai Jiao Tong University, China, in 2009, and the Ph.D. degree in mechanical engineering from the University of Michigan in 2014. He is currently an Associate Professor with the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University. His research interests include MEMS sensors and actuators, dy...View more
Contents University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Jiahao Wu received the bachelor’s degree in mechanical engineering from the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, in 2021, where he is currently pursuing the Ph.D. degree. His research interests include nonlinear dynamics in MEMS resonators, with a focus on the theory and experiment of phononic frequency combs.
Jiahao Wu received the bachelor’s degree in mechanical engineering from the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, in 2021, where he is currently pursuing the Ph.D. degree. His research interests include nonlinear dynamics in MEMS resonators, with a focus on the theory and experiment of phononic frequency combs.View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Penghui Song received the bachelor’s degree from Xi’an Jiaotong University. He is currently pursuing the Ph.D. degree with the School of Mechanical Engineering, Shanghai Jiao Tong University. His research interests include nonlinear dynamics and MEMS, including computational methods for strongly nonlinear systems and the realization and dynamics of mechanical frequency combs.
Penghui Song received the bachelor’s degree from Xi’an Jiaotong University. He is currently pursuing the Ph.D. degree with the School of Mechanical Engineering, Shanghai Jiao Tong University. His research interests include nonlinear dynamics and MEMS, including computational methods for strongly nonlinear systems and the realization and dynamics of mechanical frequency combs.View more
University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Shuke Zang received the bachelor’s degree in mechanical engineering from Shandong University in 2022. She is currently pursuing the M.Sc. degree in mechanical engineering with Shanghai Jiao Tong University. Her research interests include MEMS, dynamics and control, and motion metrology methods.
Shuke Zang received the bachelor’s degree in mechanical engineering from Shandong University in 2022. She is currently pursuing the M.Sc. degree in mechanical engineering with Shanghai Jiao Tong University. Her research interests include MEMS, dynamics and control, and motion metrology methods.View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Yan Qiao received the M.S. and Ph.D. degrees in mathematics from Northwestern Polytechnical University, China, in 2017 and 2021, respectively. She is currently a Post-Doctoral Fellow with the School of Mechanical Engineering, Shanghai Jiao Tong University. Her research interests include the design, analysis, and implementation of resonant micro/nanoelectromechanical systems for use in inertial sensing, the stochastic, and nonlinear coupling behaviors of MEMS resonators.
Yan Qiao received the M.S. and Ph.D. degrees in mathematics from Northwestern Polytechnical University, China, in 2017 and 2021, respectively. She is currently a Post-Doctoral Fellow with the School of Mechanical Engineering, Shanghai Jiao Tong University. Her research interests include the design, analysis, and implementation of resonant micro/nanoelectromechanical systems for use in inertial sensing, the stochastic, and nonlinear coupling behaviors of MEMS resonators.View more
Department of Mechanics, Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou, China
Ronghua Huan received the B.S. and Ph.D. degrees in engineering mechanics from Zhejiang University in 2002 and 2007, respectively. He was selected for Xinxing Program in 2012 and worked with the University of California at Berkeley and the University of California at Merced as a Visiting Professor. He is currently a Professor with Zhejiang University. He has published more than 100 peer-reviewed articles. His current research interests include stochastic dynamics, MEMS/NEMS dynamics, and active/semi-active control.
Ronghua Huan received the B.S. and Ph.D. degrees in engineering mechanics from Zhejiang University in 2002 and 2007, respectively. He was selected for Xinxing Program in 2012 and worked with the University of California at Berkeley and the University of California at Merced as a Visiting Professor. He is currently a Professor with Zhejiang University. He has published more than 100 peer-reviewed articles. His current research interests include stochastic dynamics, MEMS/NEMS dynamics, and active/semi-active control.View more
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
Wenming Zhang received the B.S. degree in mechanical engineering and the M.S. degree in mechanical design and theories from Southern Yangtze University, Wuxi, China, in 2000 and 2003, respectively, and the Ph.D. degree in mechanical engineering from Shanghai Jiao Tong University, Shanghai, China, in 2006. He is currently a Distinguished Professor with the State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University. His current research interests include the dynamics and control of microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), nonlinear vibration and control, smart materials, and structures.
Wenming Zhang received the B.S. degree in mechanical engineering and the M.S. degree in mechanical design and theories from Southern Yangtze University, Wuxi, China, in 2000 and 2003, respectively, and the Ph.D. degree in mechanical engineering from Shanghai Jiao Tong University, Shanghai, China, in 2006. He is currently a Distinguished Professor with the State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University. His current research interests include the dynamics and control of microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), nonlinear vibration and control, smart materials, and structures.View more
University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
Lei Shao (Member, IEEE) received the B.S. degree in mechanical engineering from Shanghai Jiao Tong University, China, in 2009, and the Ph.D. degree in mechanical engineering from the University of Michigan in 2014. He is currently an Associate Professor with the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University. His research interests include MEMS sensors and actuators, dynamics and control, and motion metrology instrumentation.
Lei Shao (Member, IEEE) received the B.S. degree in mechanical engineering from Shanghai Jiao Tong University, China, in 2009, and the Ph.D. degree in mechanical engineering from the University of Michigan in 2014. He is currently an Associate Professor with the University of Michigan–Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University. His research interests include MEMS sensors and actuators, dynamics and control, and motion metrology instrumentation.View more
