Abstract:
We design and fabricate a tunable micro-electro-mechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL) at 940-nm range. The MEMS-VCSEL uses a movable hig...Show MoreMetadata
Abstract:
We design and fabricate a tunable micro-electro-mechanical system (MEMS) vertical-cavity surface-emitting laser (VCSEL) at 940-nm range. The MEMS-VCSEL uses a movable high-contrast grating (HCG) mirror to replace the top semiconductor distributed Bragg reflector (DBR) of the common VCSEL. By applying a reverse voltage across the air layer, the HCG moves downward under the electrostatic force, thereby changing the wavelength of the MEMS-VCSEL. Theoretically, the MEMS-VCSEL with this structure can achieve a maximum wavelength tuning range of over 30 nm. At present, we have realized a tuning range of 3.7 nm at room temperature.
Published in: 2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings (ACP/POEM)
Date of Conference: 04-07 November 2023
Date Added to IEEE Xplore: 01 January 2024
ISBN Information:
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