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An ASIC Interface for MEMS Vibratory Gyroscopes With a 110 dB DR and 0.001 °s/√Hz Noise Floor Over a 100 Hz | IEEE Conference Publication | IEEE Xplore

An ASIC Interface for MEMS Vibratory Gyroscopes With a 110 dB DR and 0.001 °s/√Hz Noise Floor Over a 100 Hz


Abstract:

This paper presents an ASIC interface for MEMS vibratory gyroscopes with a wide tuning range from 5 kHz to 20 kHz. This ASIC interface integrates a sense open-loop module...Show More

Abstract:

This paper presents an ASIC interface for MEMS vibratory gyroscopes with a wide tuning range from 5 kHz to 20 kHz. This ASIC interface integrates a sense open-loop module, a drive close-loop module and mode control circuits. An ultra-high sensitivity and low-power dual chopper amplifier for the signal conditioning of the capacitance-voltage converter and an excellent dynamic range of 110 \mathrm{~dB} over a signal band of 100 \mathrm{~Hz} analog-to-digital converter are proposed for sense and drive loop detective. The readout interface is fabricated in a 0.18μm BCD technology with an HV-module and OTP. Measurement results indicate that this ASIC interface achieves a noise floor of 0.001 \circ / \mathrm{s} / \sqrt{ } \mathrm{H z} over 100 \mathrm{~Hz}, a bias stability and a bias instability of \mathrm{2. 6} \circ / \mathrm{h} and 1.05 \circ / \mathrm{h}, respectively. Moreover, the full-scale range is higher than \pm 1440 \circ / \mathrm{s}.
Date of Conference: 20-23 October 2023
Date Added to IEEE Xplore: 25 December 2023
ISBN Information:
Conference Location: Nanjing, China

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