I. Introduction
Inkjet printing is considered one of the most promising technologies in organic light-emitting diode (OLED) [1] manufacturing, where flying droplet measurement is the key to achieving a high yield rate. Online visual measurement has been widely employed in droplet measurement due to its accuracy and reliability. However, limited by optical diffraction, general visual measurement methods can hardly achieve accuracy better than ±3%. Diffraction blur caused by the optical resolution limit of lenses is inevitable and extremely affects image quality in high magnification vision systems. As shown in Fig. 1, droplet images captured by the online vision system suffer from severe blur with terrible gray distribution. Printing defects and Mura defects [2] often occur without accurate measurement of droplets. Toward Mura-free manufacturing of OLED, we have developed a series of inkjet printing equipment along with measurement and control technologies [3], [4], [5]. How to break through the bottleneck of droplet visual measurement remains challenging and is worth studying.
Diffraction blur in droplet measurement. (a) Inkjet printing. (b) Blurred droplet image. (c) Printing defects caused by abnormal droplet volume. (d) Gray distribution of (b).