Precisely tunable Fabry-Perot filter for optical communications

Proposed a micromachined precisely tunable Fabry-Perot filter fabricated using the anodic bonding method. The filter consists of an SOI wafer and glass substrate, and has multilayer dielectric mirrors. The wafer and substrate are bonded together with a small gap between them using the anodic bonding method. Wavelength tuning is achieved electrostatically by applying voltage to the SOI wafer and electrodes on glass substrate. We have demonstrated a prototype tunable Fabry-Perot filter that obtained a full width half that of the maximum width (FWHM), free spectral range (FSR) of around 0.5 nm and 35 nm respectively, and a driving voltage of 29.1 V at 30 nm.