Abstract:
As an alternative approach of constructing 3D MEMS optical crossconnectors; (OXC), we propose bulk micromachined electrostatic 2D lens-scanner arrays instead of tilting m...Show MoreMetadata
Abstract:
As an alternative approach of constructing 3D MEMS optical crossconnectors; (OXC), we propose bulk micromachined electrostatic 2D lens-scanner arrays instead of tilting mirrors. Having carefully investigated the optical and mechanical designs of MEMS OXC, we have concluded that collimator lenses have the most significant influence upon the optomechanical switching performance.
Published in: IEEE/LEOS International Conference on Optical MEMs
Date of Conference: 20-23 August 2002
Date Added to IEEE Xplore: 07 November 2002
Print ISBN:0-7803-7595-5