Static and LFN/RTN Local and Global Variability Analysis Using an Addressable Array Test Structure

The use of an addressable array test structure designed on a 28 nm FD-SOI technology for the variability analysis of static, low frequency noise (LFN) and Random Telegraph Noise (RTN) matching is presented. The experimental setup was validated, and a statistical analysis of the above electrical quantities is provided. Using such structures, combined with a switching matrix, local and global variability analysis can be performed while significantly increasing the number of samples, thus enabling a better description of the variations in LFN and RTN, especially when RTN signatures can be scarce. We show that local variations dominate the noise variability compared to global variations.