Modeling and Operation of Series-Parallel Resonant Load in Industrial RF Dielectric Heating Application

Radio Frequency (RF) based heating application is used in multiple industries like drying cross-laminated woods, food and packaging, melting silicon etc. These industrial RF heating plants operate at frequencies of 6.78 MHz, 13.56 MHz, or 27.12 MHz (ISM band). Historically, the high frequency requirement has forced the industry to rely on vacuum tube based RF generator, which are only 60% efficient. Modern semiconductors like wide bandgap (WBG) devices have achieved the high frequency operation that is required to replace the inefficient vacuum tubes. However, a comprehensive study of load network for an industrial RF heating plant has not been undertaken such that an existing plant can be retrofitted with semiconductor based turn-key solution. In this paper the authors present design equations for an industrial RF dielectric heating load structure and suggest necessary modifications required to replace vacuum tube RF generator with voltage source converter (VSC). A new figure of merit (FOM) is defined that impacts the load structure efficiency. Finally, a small-scale prototype load is manufactured as a case study. The prototype demonstrated an output power of 750 W at 6.76 MHz with an overall efficiency of 90% from DC input to RF load which can not be achieved with a vacuum tube technology.