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Methods for optimizing and extending the performance of chemiresistive gas microsensors
K. D. Benkstein;A. Vergara;C. B. Montgomery;S. Semancik;B. Raman
This paper briefly describes varied concepts developed and implemented to enhance the performance of gas-phase chemical microsensors. The developments are illustrated for chemiresistive microdevices, and involve efficient, array-based approaches to sensing materials selection and optimization, formulation of custom operating modes, and the use of bioinspired and life-extending methods. These devel...Show More
Microsensor analyses for trace targets over extended times in a simulated Martian environment
K. D. Benkstein;P. H. Rogers;C. B. Montgomery;S. Semancik;C. Jin;B. Raman
SENSORS, 2013 IEEE
Year: 2013 | Conference Paper |
We have studied the performance of a chemical microsensor array in a simulated Martian environment, which involved a carbon dioxide-rich background with low oxygen content (0.15 %) at low pressure and temperature to mimic the conditions at the Martian surface. Gas-phase target analytes (methane, ethane, hydrogen and sulfur dioxide) in complex ternary mixtures at concentrations of 200 nmol/mol and ...Show More
This study examines methods for decreasing the response time of chemiresistive, metal oxide microhotplate gas sensors. We describe a successful approach that employs an innovative pulsed-temperature operation methodology for increasing the speeds at which analytes may be recognized. By implementing the suggested strategy, we obtain, in a data-driven fashion, insights into the transduction mechanis...Show More
Detecting and recognizing chemical targets in untrained backgrounds with temperature programmed sensors
Baranidharan Raman;Rupa Shenoy;Douglas C. Meier;Kurt D. Benkstein;Casey Mungle;Steve Semancik
Applications for artificial olfaction typically require analytical performance in the context of diverse backgrounds. Therefore, to deal with practical challenges posed by chemical species recognition in the presence of pre-trained and untrained backgrounds, a desirable feature is the ability to rapidly detect fresh analyte introductions (foreground odor) and segment their contributions from the f...Show More
Improving the selectivity of a metal oxide nanowire gas sensor using a microhotplate/FET platform
2011 International Semiconductor Device Research Symposium (ISDRS)
Year: 2011 | Conference Paper |
Summary form only given: Although metal oxide nanowires have been shown to be sensitive transducer materials when employed in gas sensors, e.g. such nanowire-based sensors have been shown to detect gaseous analytes at target concentrations of 1 μmol/mol and lower; they suffer from the deleterious issue of cross-sensitivity to a broad range of gases. To address this issue, a new sensor device struc...Show More
A MEMS-based approach that uses temperature-dependent sensing responses to recognize chemical targets in untrained backgrounds
Baranidharan Raman;Rupa Shenoy;Douglas C. Meier;Kurt D. Benkstein;Steve Semancik
A major practical challenge for solid state microsensors is the detection of trace chemical species over time and in complex gas-phase backgrounds. We describe a MEMS-based, chemiresistive technology that has succeeded in such problems by combining oxide nanomaterials on microscale platforms, acquisition of dense temperature-dependent response data streams, and novel signal processing methods. Unl...Show More
Microsensors in Dynamic Backgrounds: Toward Real-Time Breath Monitoring
Kurt D. Benkstein;Baranidharan Raman;Christopher B. Montgomery;Carlos J. Martinez;Steve Semancik
We evaluated a microelectromechanical systems (MEMS) microsensor array with temperature-controlled chemi-resistive elements for use as a noninvasive clinical diagnostic tool to detect the presence or absence of trace amounts of disease biomarkers in simulated breath samples. The microsensor environment was periodically altered between air (78% N2, 21% O2 by volume, 20% relative humidity) and simul...Show More
Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-electron Beam Lithography (soft-eBL)
Suresh Donthu;Nasim Alem;Zixiao Pan;Shu-You Li;Gajendra Shekhawat;Vinayak Dravid;Kurt D. Benkstein;Steve Semancik
We demonstrate the use of a facile nanopatterning scheme known as soft electron beam lithography (soft-eBL) to fabricate and site specifically position a variety of functional ceramic nanostructures onto two fragile substrates: a 75-nm-thick electron-transparent silicon nitride membrane and suspended microhotplates with embedded heaters. The patterned nanostructures on nitride membranes can be rea...Show More
Enabling MEMS Chemical Microsensor Arrays for Trace Analyte Detection
Douglas C. Meier;Jon K. Evju;Kurt D. Benkstein;Baranidharan Raman;Zvi Boger;David L. Lahr;Steve Semancik
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Year: 2007 | Conference Paper |
We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition...Show More
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