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P. Bergveld - IEEE Xplore Author Profile
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P. Bergveld

Also published under: Piet Bergveld

Publications
48
Citations
3,717
Publications by Year
19682005
Co-Authors:
Show All Co-Authors (52)
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P. Bergveld

Also published under: Piet Bergveld

Affiliation

The Lab-on-a-Chip group
MESA Research Institute
University of Twente, Netherlands

Publication Topics

Biography

Piet Bergveld was born in Oosterwolde, The Netherlands, on January 26, 1940. He received the M.S. degree in electrical engineering from the University of Eindhoven, Eindhoven, The Netherlands, in 1965 and the Ph.D. degree from the University of Twente, Enschede, The Netherlands, in 1973. The subject of his dissertation was the development of ISFETs and related devices and the actual invention of the ISFET.,Since 1965, he has been a member of the Biomedical Engineering Division, Faculty of Electrical Engineering, University of Twente, and was appointed to Full Professor of biosensor technology in 1984. He is one of the Project Leaders at the MESA+ Research Institute, University of Twente. His research subjects concern the further development...
Publications
48
Citations
3,717
Publications by Year
19682005
Co-Authors:
Show All Co-Authors (52)
Author's Published Works

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Catalytic hydrogen peroxide decomposition on La/sub 1-x/Sr/sub x/CoO/sub 3-/spl delta// perovskite oxide

V.-A.T. Dam;W. Olthuis;P. Bergveld;A. van den Berg

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Year: 2005 | Conference Paper |
Cited by: Papers (1)
Lanthanide perovskite oxides are mentioned as material for hydrogen peroxide sensor because they can catalytically decompose hydrogen peroxide in an aqueous medium. The catalytic properties of these perovskite oxides to hydrogen peroxide are suggested due to their oxygen vacancies influenced by the oxide non-stoichiometry. In this paper, we investigate the catalytic hydrogen peroxide decomposition...Show More

Catalytic hydrogen peroxide decomposition on La/sub 1-x/Sr/sub x/CoO/sub 3-/spl delta// perovskite oxide

V.-A.T. Dam;W. Olthuis;P. Bergveld;A. van den Berg

Year: 2005 | Volume: 2 | Conference Paper |

A micro CO/sub 2/ gas sensor based on sensing of pH-sensitive hydrogel swelling by means of a pressure sensor

S. Herber;J. Bomer;W. Olthuis;P. Bergveld;A. van den Berg

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Year: 2005 | Conference Paper |
Cited by: Papers (1) | Patents (1)
In this paper a sensor is presented for the detection of carbon dioxide gas inside the stomach in order to diagnose gastrointestinal ischemia. The operational principle of the sensor is measuring the CO/sub 2/ induced pressure generation of a confined pH-sensitive hydrogel by means of a micro pressure sensor. The sensor is capable of measuring CO/sub 2/ with a response time between 2 and 4 minutes...Show More

A micro CO/sub 2/ gas sensor based on sensing of pH-sensitive hydrogel swelling by means of a pressure sensor

S. Herber;J. Bomer;W. Olthuis;P. Bergveld;A. van den Berg

Year: 2005 | Volume: 2 | Conference Paper |

Work function characterization of electroactive materials using an /sup E/MOSFET

D.T. Van Anh;W. Olthuis;P. Bergveld

IEEE Sensors Journal
Year: 2004 | Volume: 4, Issue: 3 | Journal Article |
Cited by: Papers (3)
Materials with redox properties have been widely used in sensing applications. Understanding the redox properties of these materials is an important issue. In order to investigate the redox properties, there are several methods, such as using the Kelvin probe and a conductivity sensor, or using other well-known electrochemical techniques. In this paper, we introduce another possibility to characte...Show More

Work function characterization of electroactive materials using an /sup E/MOSFET

D.T. Van Anh;W. Olthuis;P. Bergveld

Year: 2004 | Volume: 4, Issue: 3 | Journal Article |

Electroactive gate materials for a hydrogen peroxide sensitive /sup E/MOSFET

D.T.V. Anh;W. Olthuis;P. Bergveld

IEEE Sensors Journal
Year: 2002 | Volume: 2, Issue: 1 | Journal Article |
Describes the detection principle of a hydrogen peroxide sensor based on the electrolyte metal oxide semiconductor field effect transistor (/sup E/MOSFET) and possibilities of using different types of redox materials as the gate material for the sensor with respect to the sensitivity and detection limit. After discussing the fundamentals of hydrogen peroxide detection and a short description of th...Show More

Electroactive gate materials for a hydrogen peroxide sensitive /sup E/MOSFET

D.T.V. Anh;W. Olthuis;P. Bergveld

Year: 2002 | Volume: 2, Issue: 1 | Journal Article |

Fabrication and packaging of a miniature sensor array for harsh environments

E.A. Dijkstra;W. Olthuis;J.G. Bomer;P. Bergveld;D.A. Kronemeijer

2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)
Year: 2001 | Conference Paper |
This paper describes the fabrication of devices to be used in harsh environments. The devices should operate under extreme conditions: high temperature (180/spl deg/C), high pressure (200 bar) and in a chemically aggressive environment. Therefore, packaging is a major concern. Sensor fabrication and packaging is described. Two devices were made and tested at the temperature and pressure mentioned ...Show More

Fabrication and packaging of a miniature sensor array for harsh environments

E.A. Dijkstra;W. Olthuis;J.G. Bomer;P. Bergveld;D.A. Kronemeijer

Year: 2001 | Conference Paper |

On the integration of a microdialysis-based /spl mu/TAS with calibration facility on a silicon-glass sandwich

A. Sprenkels;W. Olthuis;P. Bergveld

1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451)
Year: 2000 | Conference Paper |
Cited by: Papers (2)
The integration is discussed of all parts of a microdialysis-based micro Total Analysis System or /spl mu/TAS. In particular a microdialysis probe, a potentiometric and amperometric ion- and enzyme sensor and a calibration dosing pump have been developed separately using different precision machining techniques. By modifying and adapting these parts they can be realized in one generic technology c...Show More

On the integration of a microdialysis-based /spl mu/TAS with calibration facility on a silicon-glass sandwich

A. Sprenkels;W. Olthuis;P. Bergveld

Year: 2000 | Conference Paper |

A bi-directional electrochemically driven micro liquid dosing system with integrated sensor/actuator electrodes

S. Bohm;W. Olthuis;P. Bergveld

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
Year: 2000 | Conference Paper |
Cited by: Papers (7)
In this contribution a micro liquid dosing system is presented, which allows bi-directional manipulation of fluids (i.e. pushing out and pulling in of liquids) by the electrochemical generation and removal of gas bubbles. Bi-directionality is obtained by reversal of the actuation current thereby causing the earlier produced gasses to react back to water. This reduction of gas volume actively pulls...Show More

A bi-directional electrochemically driven micro liquid dosing system with integrated sensor/actuator electrodes

S. Bohm;W. Olthuis;P. Bergveld

Year: 2000 | Conference Paper |

A sensitive differential capacitance to voltage converter for sensor applications

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

IEEE Transactions on Instrumentation and Measurement
Year: 1999 | Volume: 48, Issue: 1 | Journal Article |
There is a need for capacitance to voltage converters (CVC's) for differential capacitive sensors like pressure sensors and accelerometers which can measure both statically and dynamically. A suitable CVC is described in this paper. The CVC proposed is based on a symmetrical structure containing two half ac bridges, is intrinsically immune to parasitic capacitances and resistances, is capable of d...Show More

A sensitive differential capacitance to voltage converter for sensor applications

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

Year: 1999 | Volume: 48, Issue: 1 | Journal Article |

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

M. Pederson;W. Olthuis;P. Bergveld

Journal of Microelectromechanical Systems
Year: 1998 | Volume: 7, Issue: 4 | Journal Article |
The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon. Therefore, the structure can be realized by postprocessing on substrates containing integrated circuits (IC's), independently of the IC process, integrated microphones with excellent performances have been realized on a CMOS subst...Show More

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

M. Pederson;W. Olthuis;P. Bergveld

Year: 1998 | Volume: 7, Issue: 4 | Journal Article |

Artificial and natural sensors in FES-assisted human movement control

P.H. Veltink;T. Sinkjaer;C.T.M. Baten;P. Bergveld;J. van der Spek;M. Haugland

Proceedings of the 20th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. Vol.20 Biomedical Engineering Towards the Year 2000 and Beyond (Cat. No.98CH36286)
Year: 1998 | Conference Paper |
Cited by: Papers (4)
The availability of small and light micromachined sensors for human use and the demonstration that useful signals can be derived from the natural sensors of the human body have enabled new developments in the area of feedback controlled FES assistance of human movements. This paper presents the need for sensory feedback in FES control systems and gives an overview of available artificial sensors f...Show More

Artificial and natural sensors in FES-assisted human movement control

P.H. Veltink;T. Sinkjaer;C.T.M. Baten;P. Bergveld;J. van der Spek;M. Haugland

Year: 1998 | Volume: 5 | Conference Paper |

Ultrasonic distance detection for a closed-loop spinal cord stimulation system

E.A. Dijkstra;J. Holsheimer;W. Olthuis;P. Bergveld

Proceedings of the 19th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. 'Magnificent Milestones and Emerging Opportunities in Medical Engineering' (Cat. No.97CH36136)
Year: 1997 | Conference Paper |
When stimulating the spinal cord at a constant strength, the current density in the spinal cord and thus the effects on chronic, intractable pain and vascular insufficiency will change with body position, due to the varying separation of the spinal cord and the stimulating electrode. The current density in the spinal cord has to remain between the perception and discomfort threshold (stimulation w...Show More

Ultrasonic distance detection for a closed-loop spinal cord stimulation system

E.A. Dijkstra;J. Holsheimer;W. Olthuis;P. Bergveld

Year: 1997 | Volume: 5 | Conference Paper |

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
Year: 1997 | Conference Paper |
Cited by: Papers (6)
A highly symmetrical cubic easy-to-assemble capacitive triaxial accelerometer for biomedical applications has been designed, realized and tested. The outer dimensions of the sensor are 5/spl times/5/spl times/5 mm/sup 3/ and the device is mounted on a standard IC package. New aspects of the sensor are an easy assembly procedure, the use of the polymers polydimethylsiloxane (PDMS) as spring materia...Show More

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

Year: 1997 | Conference Paper |

A polymer condenser microphone on silicon with on-chip CMOS amplifier

M. Pedersen;W. Olthuis;P. Bergveld

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Year: 1997 | Conference Paper |
Cited by: Papers (2) | Patents (7)
In this paper the development of a capacitive microphone with integrated preamplifier is described. The condenser microphone is made by micromachining of polyimide on silicon, and is compatible with CMOS technology. Therefore, the structure can be realised by post processing on substrates containing integrated circuits, independently of the IC process. Microphones with a required DC bias voltage o...Show More

A polymer condenser microphone on silicon with on-chip CMOS amplifier

M. Pedersen;W. Olthuis;P. Bergveld

Year: 1997 | Volume: 1 | Conference Paper |

Measuring conductivity, temperature and hydrogen peroxide concentration using a single sensor structure

G.R. Langereis;W. Olthuis;P. Bergveld

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Year: 1997 | Conference Paper |
Cited by: Papers (2) | Patents (1)
Using a single multi purpose sensor structure, consisting of metal films on a substrate only, three electrolyte parameters have been measured. The parameters are temperature, conductivity and hydrogen peroxide concentration, where the latter one represents one example of many species that can be determined amperometrically. The active area of the fabricated devices is about 1 mm/sup 2/.Show More

Measuring conductivity, temperature and hydrogen peroxide concentration using a single sensor structure

G.R. Langereis;W. Olthuis;P. Bergveld

Year: 1997 | Volume: 1 | Conference Paper |

A drift free nernstian iridium oxide pH sensor

J. Hendrikse;W. Olthuis;P. Bergveld

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Year: 1997 | Conference Paper |
Cited by: Papers (3)
A novel way of eliminating drift problems in metal oxide pH sensors is presented. The method employs a FET-structure under the electrode that uses the metal oxide as a gate contact. In addition to the enhanced drift properties, the new sensor has an almost ideal nernstian response. First a theoretical explanation is given, which is then confirmed by measurements.Show More

A drift free nernstian iridium oxide pH sensor

J. Hendrikse;W. Olthuis;P. Bergveld

Year: 1997 | Volume: 2 | Conference Paper |

Characteristics of a highly symmetrical miniature capacitive triaxial accelerometer

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Year: 1997 | Conference Paper |
A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, realised and tested. The sensors are available in two outer dimensions, namely 2/spl times/2/spl times/2 and 5/spl times/5/spl times/5 mm/sup 3/. The devices are mounted on a standard IC package for easy testing. Features of the sensor are a highly symmetrical cubic structure, capacitive cou...Show More

Characteristics of a highly symmetrical miniature capacitive triaxial accelerometer

J.C. Lotters;W. Olthuis;P.H. Veltink;P. Bergveld

Year: 1997 | Volume: 2 | Conference Paper |

Dynamic surface tension measured with an integrated sensor-actuator device using electrolytically generated gas bubbles

W. Olthuis;A. Volanschi;P. Bergveld

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Year: 1997 | Conference Paper |
In this paper, a new, simple method to determine dynamic surface tension in aqueous solutions is reported, explained and experimentally verified. By function integration, a small device is obtained; apart from control and interface electronics no external components or systems are necessary. Instead of the conventional sparging, we use the (cathodic) electrolysis of water at an actuator to produce...Show More

Dynamic surface tension measured with an integrated sensor-actuator device using electrolytically generated gas bubbles

W. Olthuis;A. Volanschi;P. Bergveld

Year: 1997 | Volume: 2 | Conference Paper |

Integration of an ISFET with a porous microelectrode for application to protein characterization

J. Luo;K. Kaler;W. Olthuis;P. Bergveld

Proceedings of 1996 Canadian Conference on Electrical and Computer Engineering
Year: 1996 | Conference Paper |
This paper describes a way of dynamic buffer capacity measurement to characterize proteins, using a coulometric sensor-actuator system. The sensor-actuator is made by integrating an ISFET (ion-sensitive field effect transistor) with a porous microelectrode. Lysozyme and ribonuclease were studied. The results show that the buffer capacity of proteins is both a function of pH and their concentration...Show More

Integration of an ISFET with a porous microelectrode for application to protein characterization

J. Luo;K. Kaler;W. Olthuis;P. Bergveld

Year: 1996 | Volume: 1 | Conference Paper |

Gas Bubbles Electrolytically Generated At Microcavity Electrodes (MCE) Used For The Measurement Of The Dynamic Surface Tension In Liquids

A. Volanschi;W. Olthuis;P. Bergveld

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
Year: 1995 | Conference Paper |
Cited by: Papers (1)
A new method is proposed for the measurement of dynamic surface tension in aqueous solutions. The advantage of this method with respect to the classical method based on sparging is that the use of gas pumps is avoided, resulting in a miniaturised system. This method is based on the in-situ generation of gas bubbles by means of electrolysis at MicroCavity Electrodes (MCE). As a consequence of elect...
First Page of the Article
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Gas Bubbles Electrolytically Generated At Microcavity Electrodes (MCE) Used For The Measurement Of The Dynamic Surface Tension In Liquids

A. Volanschi;W. Olthuis;P. Bergveld

Year: 1995 | Volume: 1 | Conference Paper |

On The Electromechanical Behaviour Of Thin Perforated Backplates In Silicon Condenser Microphones

M. Pedersen;W. Olthuis;P. Bergveld

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
Year: 1995 | Conference Paper |
Cited by: Papers (4) | Patents (2)
In this work an alternative approach to the modelling of plates with a large number of holes, is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalising the strain-energy of the perforated and the orthotropic plate. The model obtain...
First Page of the Article
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On The Electromechanical Behaviour Of Thin Perforated Backplates In Silicon Condenser Microphones

M. Pedersen;W. Olthuis;P. Bergveld

Year: 1995 | Volume: 2 | Conference Paper |

The design, fabrication, and testing of corrugated silicon nitride diaphragms

P.R. Scheeper;W. Olthuis;P. Bergveld

Journal of Microelectromechanical Systems
Year: 1994 | Volume: 3, Issue: 1 | Journal Article |
Silicon nitride corrugated diaphragms of 2 mm/spl times/2 mm/spl times/1 /spl mu/m have been fabricated with 8 circular corrugations, having depths of 4, 10, or 14 /spl mu/m. The diaphragms with 4-/spl mu/m-deep corrugations show a measured mechanical sensitivity (increase in the deflection over the increase in the applied pressure) which is 25 times larger than the mechanical sensitivity of flat ...Show More

The design, fabrication, and testing of corrugated silicon nitride diaphragms

P.R. Scheeper;W. Olthuis;P. Bergveld

Year: 1994 | Volume: 3, Issue: 1 | Journal Article |

A new tonometer based on the application of micro-mechanical sensors

C. den Besten;P. Bergveld

[1993] Proceedings IEEE Micro Electro Mechanical Systems
Year: 1993 | Conference Paper |
Cited by: Patents (2)
An instrument for the measurement of intraocular pressure (IOP) is presented. It consists of a micromachined silicon sensor, which measures the diameter of a flattened part of the eye globe and simultaneously determines the smallest distance between the center of the sensor and the contour of this applanation. In the center of this applanation sensor a micro mechanical plunger is realized, which t...Show More

A new tonometer based on the application of micro-mechanical sensors

C. den Besten;P. Bergveld

Year: 1993 | Conference Paper |

Polymer bonding of micro-machined silicon structures

C. den Besten;R.E.G. van Hal;J. Munoz;P. Bergveld

[1992] Proceedings IEEE Micro Electro Mechanical Systems
Year: 1992 | Conference Paper |
Polymer bonding is an indirect bonding technique that can be performed at temperatures of less than 150 degrees C. Thin layers of negative photoresist polyimide and epoxy were used to bond micromachined test devices to other pieces of silicon. The strength of the resulting bond and the influence of primers like APS and HMDS on the bond strength were tested. The best results were achieved with nega...Show More

Polymer bonding of micro-machined silicon structures

C. den Besten;R.E.G. van Hal;J. Munoz;P. Bergveld

Year: 1992 | Conference Paper |

Fabrication of silicon condenser microphones using single wafer technology

P.R. Scheeper;A.G.H. van der Donk;W. Olthuis;P. Bergveld

Journal of Microelectromechanical Systems
Year: 1992 | Volume: 1, Issue: 3 | Journal Article |
A condenser microphone design that can be fabricated using the sacrificial layer technique is proposed and tested. The microphone backplate is a 1- mu m plasma-enhanced chemical-vapor-deposited (PECVD) silicon nitride film with a high density of acoustic holes (120-525 holes/mm/sup 2/), covered with a thin Ti/Au electrode. Microphones with a flat frequency response between 100 Hz and 14 kHz and a ...Show More

Fabrication of silicon condenser microphones using single wafer technology

P.R. Scheeper;A.G.H. van der Donk;W. Olthuis;P. Bergveld

Year: 1992 | Volume: 1, Issue: 3 | Journal Article |

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