Author details

P. Morin
Also published under: Pierre Morin
Affiliation
imec vzw
Kapeldreef 75
Leuven, Belgium
Biography
Pierre Morin was born in France in 1965. He received the Ph.D. degree in electronics from Pierre & Marie Curie University, Paris, in 1995.,From 1995 to 2000, he was with Phillips, involved in electron optics and physical processes developments for cathode ray tubes. He joined ST Microelectronics, Crolles, France, in 2000, to work on thin film processes development. He was then in charge the integration of low thermal budget deposition processes in FEOL flows and of several stressor modules in 65- and 45-nm CMOS technology nodes. He is member of the R&D technical staff, in charge of FEOL processes for CMOS and Flash memories, and has managed the project dedicated to solving the pattern effects issues in the 45/40-nm node. He has authored or ... Author's Published Works