Abstract:
In this work we present a SAW resonator topology that enables the design of spurious free SAW resonators in wide frequency band. Here we demonstrate the suppression of hi...Show MoreMetadata
Abstract:
In this work we present a SAW resonator topology that enables the design of spurious free SAW resonators in wide frequency band. Here we demonstrate the suppression of higher order modes in a POI (piezoelectric on insulator) stack on high acoustic impedance base substrate, along with transverse mode suppression through specific stack design exhibiting a vertical in-plane SAW dispersion.
Published in: 2022 IEEE International Ultrasonics Symposium (IUS)
Date of Conference: 10-13 October 2022
Date Added to IEEE Xplore: 01 December 2022
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