Abstract:
In this paper, a differential micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) micro-cavities is presented. The optical system of ...Show MoreMetadata
Abstract:
In this paper, a differential micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is suspended by four springs. The applied acceleration tends to move the PM from its resting position. This mechanical displacement can be measured by the FP interferometer formed between the proof mass cross-section and the optical fiber end-face. The proposed sensor is fabricated on a silicon-on-insulator wafer using the bulk micromachining method. The results of the sensor characterization show that the accelerometer has a linear response in the range of \boldsymbol {\pm }1\text{g} . Also, the optical sensitivity and resolution of the sensor in the static characterization are 6.52 nm/g and 153 \boldsymbol {\mu }\text{g} . The sensor sensitivity in the power measurement is 49.6 mV/g and its resonant frequency is at 1372 Hz. Using the differential measurement method increases the sensitivity of the accelerometer. Based on the experimental data, the optical sensitivity in static mode is two times as high as that of a similar MOEMS accelerometer with one FP cavity.
Published in: IEEE Sensors Journal ( Volume: 22, Issue: 15, 01 August 2022)
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- IEEE Keywords
- Index Terms
- Fabry-Perot ,
- Micro Opto Electro-Mechanical System ,
- Optical Fiber ,
- Resonance Frequency ,
- Range Of Responses ,
- Linear Response ,
- Sensitivity Of The Sensor ,
- Static Mode ,
- Mass Calibration ,
- Device System ,
- Sensor Resolution ,
- Static Characteristics ,
- Fabry-Perot Interferometer ,
- Rest Position ,
- Mechanical Displacement ,
- Linear Response Range ,
- Fabry-Perot Cavity ,
- Low Sensitivity ,
- Measurement Range ,
- Fabrication Process ,
- Cavity Length ,
- Optical Spectra ,
- Optical Shift ,
- Sensor Response ,
- Optical Design ,
- Modulation Frequency ,
- Finite-difference Time-domain ,
- Intensive Monitoring ,
- Central Wavelength
- Author Keywords
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Fabry-Perot ,
- Micro Opto Electro-Mechanical System ,
- Optical Fiber ,
- Resonance Frequency ,
- Range Of Responses ,
- Linear Response ,
- Sensitivity Of The Sensor ,
- Static Mode ,
- Mass Calibration ,
- Device System ,
- Sensor Resolution ,
- Static Characteristics ,
- Fabry-Perot Interferometer ,
- Rest Position ,
- Mechanical Displacement ,
- Linear Response Range ,
- Fabry-Perot Cavity ,
- Low Sensitivity ,
- Measurement Range ,
- Fabrication Process ,
- Cavity Length ,
- Optical Spectra ,
- Optical Shift ,
- Sensor Response ,
- Optical Design ,
- Modulation Frequency ,
- Finite-difference Time-domain ,
- Intensive Monitoring ,
- Central Wavelength
- Author Keywords