Abstract:
We demonstrate a high Q, compact photonic crystal nanobeam cavity in the new 45 nm GlobalFoundries 45CLO monolithic electronics-photonics platform optimized for silicon p...Show MoreMetadata
Abstract:
We demonstrate a high Q, compact photonic crystal nanobeam cavity in the new 45 nm GlobalFoundries 45CLO monolithic electronics-photonics platform optimized for silicon photonics - with an intrinsic Q of 134,000, FSR of 24.17 nm, and a theoretical Q/V of 2.2×105(λ/n)-3.
Date of Conference: 07-10 December 2021
Date Added to IEEE Xplore: 18 January 2022
ISBN Information: