Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units | IEEE Conference Publication | IEEE Xplore

Thermal effects of ovenized clocks on episeal encapsulated inertial measurement units


Abstract:

In this paper, we demonstrate the thermal effects of micro-ovenized clocks embedded in the device layer of a vacuum sealed MEMS inertial measurement unit. We demonstrate ...Show More

Abstract:

In this paper, we demonstrate the thermal effects of micro-ovenized clocks embedded in the device layer of a vacuum sealed MEMS inertial measurement unit. We demonstrate a novel in-plane suspension and heater that provides improved thermal isolation within a mm-scale chip, compared to in-cap heaters. We show the interaction of three resonators within a single die: an ovenized tuning fork, a resonant accelerometer, and a disk resonating gyroscope. We demonstrate that a device layer micro-oven, which operates at a tenth of the power of an encapsulation cap-layer micro-oven, has very small effects on the frequency of the other resonators in the die, thus proving good thermal isolation in our structures. We show that the in-plane heater isolation provides more than a 15X reduction of frequency deviation of adjacent sensors.
Date of Conference: 21-25 January 2018
Date Added to IEEE Xplore: 26 April 2018
ISBN Information:
Electronic ISSN: 2160-1968
Conference Location: Belfast, UK

References

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