FEM modeling of squeeze film damping effect in RF-MEMS switches | IEEE Conference Publication | IEEE Xplore

FEM modeling of squeeze film damping effect in RF-MEMS switches


Abstract:

A very important aspect in the design of RF-MEMS switches, is to obtain low switching time. The switching time not only depends on the device geometric parameters but als...Show More

Abstract:

A very important aspect in the design of RF-MEMS switches, is to obtain low switching time. The switching time not only depends on the device geometric parameters but also on the operating conditions. This paper presents the squeeze film damping effect on the dynamic response of the RF-MEMS switches. The squeeze film damping effect, with and without perforations, on the switching time is analyzed using finite element method (FEM) simulations. The effect of temperature and humidity on the squeeze film damping and switching time is also investigated.
Date of Conference: 19-21 September 2017
Date Added to IEEE Xplore: 25 December 2017
ISBN Information:
Conference Location: Yogyakarta, Indonesia

References

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