Nano-gap vapor sensor

This paper reports the development of a nano-gap vapor sensor that is capable of detecting an airborne target in a repeatable manner in near-zero static power consumption. The nano-gap sensor employed a matching gap distance of 5.8 nm to the lengths of both linkers and targets for selectivity. The nano-gap sensor was fabricated based on deposition and removal of a thin sacrificial layer via atomic-layer-deposition (ALD), and then coated with newly-synthesized linkers. The fabricated vapor sensor demonstrated the detection of a target gas (1, 5-Diaminopentane) or Cadaverine in a concentration of <;100ppm; produced a notable on/off current ratio of 10⁴~10⁷; and repeatable performance up to 2 times.