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A Sub-400-nT/-, 775--, Multi-Loop MEMS Magnetometer With Integrated Readout Electronics | IEEE Journals & Magazine | IEEE Xplore

A Sub-400-nT/ \sqrt {\text {Hz}} , 775- \mu \text{W} , Multi-Loop MEMS Magnetometer With Integrated Readout Electronics


Abstract:

This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, a...Show More

Abstract:

This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power readout integrated circuit. The sensor is fabricated using an industrial process, and exploits an Al-on-polysilicon multi-loop architecture that gives a five-fold sensitivity and resolution improvement, useful for off-resonance operation. The integrated readout is based on a differential charge amplifier front-end, and designed to be balanced with the sensor in terms of noise and power consumption. The overall system, including demodulation and filtering stages, shows a programmable full-scale up to ±2.4 mT, limited by the electronics saturation. The bandwidth can be programmed up to 150 Hz for off-resonance operation where a sub-400-nT/√Hz resolution at 775-μW power consumption is obtained, including the integrated readout and the Lorentz current. Perspectives on low-consumption driving oscillators for off-resonance mode are finally given.
Published in: Journal of Microelectromechanical Systems ( Volume: 24, Issue: 6, December 2015)
Page(s): 1938 - 1950
Date of Publication: 21 July 2015

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