Abstract:
In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam wi...Show MoreMetadata
Abstract:
In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.
Published in: 2015 XVIII AISEM Annual Conference
Date of Conference: 03-05 February 2015
Date Added to IEEE Xplore: 26 March 2015
Electronic ISBN:978-1-4799-8591-3