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Design of MEMS mass sensors based of flexural phononic crystals | IEEE Conference Publication | IEEE Xplore

Design of MEMS mass sensors based of flexural phononic crystals


Abstract:

In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam wi...Show More

Abstract:

In this work, a piezoelectrically actuated MEMS flexural phononic crystal (PC) mass sensor aimed at biosensing applications, and based on a single crystal silicon beam with periodic perforations, is presented. We introduce a transmission matrix approach based on the Timoshenko beam theory suited for the fast design of such devices. The calculated transmission spectra are in excellent agreement with FEM simulations. A preliminary estimate of the device sensitivity, assuming the prostate specific antigen (PSA) as the target analyte, is reported.
Date of Conference: 03-05 February 2015
Date Added to IEEE Xplore: 26 March 2015
Electronic ISBN:978-1-4799-8591-3
Conference Location: Trento, Italy

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