Abstract:
Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1µm×1µm×0.5µm dots with 2µm...Show MoreMetadata
Abstract:
Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1µm×1µm×0.5µm dots with 2µm pitch in area of 50µm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140°C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.
Published in: The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Date of Conference: 07-10 April 2013
Date Added to IEEE Xplore: 18 July 2013
ISBN Information:
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