Abstract:
In this work, we present the frequency analysis of a micromachined thermal accelerometer based on convection. Open-loop block diagram representation is first introduced t...Show MoreMetadata
Abstract:
In this work, we present the frequency analysis of a micromachined thermal accelerometer based on convection. Open-loop block diagram representation is first introduced to explain the sensor behavior. New sensor architecture is imagined to enhance sensor characteristics: a closed-loop configuration is designed by addition of two resistors closed to detectors. Effects on thermal sensitivity and bandwidth are investigated.
Date of Conference: 11-13 May 2011
Date Added to IEEE Xplore: 23 January 2012
ISBN Information:
Conference Location: Aix-en-Provence, France