Determination of the local electric field strength by Energy dispersive Photon Emission Microscopy | IEEE Conference Publication | IEEE Xplore

Determination of the local electric field strength by Energy dispersive Photon Emission Microscopy


Abstract:

Energy-dispersive Photon Emission Microscopy (PEM) allows the local electron temperature distribution to be characterized with high accuracy and sensitivity. The suitabil...Show More

Abstract:

Energy-dispersive Photon Emission Microscopy (PEM) allows the local electron temperature distribution to be characterized with high accuracy and sensitivity. The suitability and potential of this new technique for failure analysis and reliability investigation of semiconductor devices are demonstrated by the spatially resolved analysis of non-uniform breakdowns. With state-of-the-art devices in nanometer dimensions the charge carrier transport is analyzed in order to determine the electric field strength distribution.
Date of Conference: 02-06 May 2010
Date Added to IEEE Xplore: 17 June 2010
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Conference Location: Anaheim, CA, USA

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