Abstract:
Microfabricated electric generators, scavenging ambient mechanical energy, are potential power sources for autonomous systems. Described presently are the design, modelin...Show MoreMetadata
Abstract:
Microfabricated electric generators, scavenging ambient mechanical energy, are potential power sources for autonomous systems. Described presently are the design, modeling, and implementation of a single-wafer floating-electrode electric microgenerator, integrating a micromechanical resonator and a number of electronic devices. Forming a plate of a variable capacitor, the resonator is responsible for converting mechanical vibration to electricity. A sense transistor and a diode bridge are integrated, respectively, for monitoring the "charging" of the floating electrode and for rectification. A lumped electromechanical model of the generator is developed and expressed in terms of a set of nonlinear coupled state equations that are numerically solved. For small-amplitude excitation, a circuit based on a set of linearized equations is developed. The generator is realized using a compatible combination of standard complementary metal-oxide-semiconductor (CMOS) "floating gate" process and a post-CMOS photoresist molded electroplating process. Adequate agreement between model predictions and measurement results was obtained
Published in: Journal of Microelectromechanical Systems ( Volume: 16, Issue: 1, February 2007)
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Power Generation ,
- Set Of Equations ,
- Equation Of State ,
- Microfabrication ,
- Mechanical Energy ,
- Mechanical Vibration ,
- Ambient Energy ,
- Coupled Equations ,
- Diode Bridge ,
- Waveform ,
- Differential Equations ,
- State Variables ,
- Output Power ,
- Spring Constant ,
- Fundamental Frequency ,
- Angular Frequency ,
- Silicon Nitride ,
- Parasitic Capacitance ,
- Newton’s Second Law ,
- Mechanical Resonance ,
- Low-pressure Chemical Vapor Deposition ,
- Electret ,
- Kirchhoff’s Current Law ,
- Field Coupling ,
- Electrostatic Field ,
- Part Of Diagram
- Author Keywords
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Power Generation ,
- Set Of Equations ,
- Equation Of State ,
- Microfabrication ,
- Mechanical Energy ,
- Mechanical Vibration ,
- Ambient Energy ,
- Coupled Equations ,
- Diode Bridge ,
- Waveform ,
- Differential Equations ,
- State Variables ,
- Output Power ,
- Spring Constant ,
- Fundamental Frequency ,
- Angular Frequency ,
- Silicon Nitride ,
- Parasitic Capacitance ,
- Newton’s Second Law ,
- Mechanical Resonance ,
- Low-pressure Chemical Vapor Deposition ,
- Electret ,
- Kirchhoff’s Current Law ,
- Field Coupling ,
- Electrostatic Field ,
- Part Of Diagram
- Author Keywords