Abstract:
In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated C...Show MoreMetadata
Abstract:
In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated CNT field emitter fabrication by use of the selective growth of CNT between Cr and Si surface.
Published in: Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
Date of Conference: 29-31 October 2003
Date Added to IEEE Xplore: 08 March 2004
Print ISBN:4-89114-040-2
Contents 