Loading [a11y]/accessibility-menu.js
Fabrication of integrated carbon nanotube field emitter with extraction electrode | IEEE Conference Publication | IEEE Xplore

Fabrication of integrated carbon nanotube field emitter with extraction electrode


Abstract:

In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated C...Show More

Abstract:

In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated CNT field emitter fabrication by use of the selective growth of CNT between Cr and Si surface.
Date of Conference: 29-31 October 2003
Date Added to IEEE Xplore: 08 March 2004
Print ISBN:4-89114-040-2
Conference Location: Tokyo, Japan

Contact IEEE to Subscribe

References

References is not available for this document.