Abstract:
This paper presents a new electrostatic resonant accelerometer with force-rebalance control. Conventional electrostatic resonant accelerometers detect acceleration based ...Show MoreMetadata
Abstract:
This paper presents a new electrostatic resonant accelerometer with force-rebalance control. Conventional electrostatic resonant accelerometers detect acceleration based on the modulation of the antiphase resonance frequencies of two masses. In contrast, the proposed sensor performs force-rebalance control to keep the antiphase resonance frequency constant under acceleration. The sensor output is the control voltage. In this study, the sensor structure composed of two masses, excitation electrodes, monitor electrodes, electrical-spring electrodes, and force-rebalance control electrodes is designed and fabricated, and the sensor system is implemented. Measurements show that the sensor output has a sensitivity of 0.72 V /g while the antiphase resonance frequency is kept constant. The experimental results demonstrate the working principle of the proposed resonant accelerometer.
Published in: 2024 IEEE SENSORS
Date of Conference: 20-23 October 2024
Date Added to IEEE Xplore: 17 December 2024
ISBN Information: