Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection

This paper details the design, fabrication, and characterization of a novel disposable MEMS airflow sensor, employing Bare Conductive electric paint deposited on Whatman 3MM chromatography paper through silk screen printing. The sensor achieves rapid fabrication within 30 minutes. It demonstrates a sensitivity of 1.8 kPa−1, a resolution of 27.6 kPa, and a limit of detection (LoD) of 48.94 kPa, with an operational pressure range from 27.6 to 137.9 kPa. An electronic readout circuit transduces electrical resistance variations into voltage signals, which are monitored via a digital multimeter and analyzed on a PC. The sensor’s disposable nature mitigates nosocomial infection risks and enhances hygiene, making it ideal for monitoring respiratory conditions such as asthma and COPD. With a material cost of under ${\$}0.1$ , the sensor is highly suitable for scalable, cost-sensitive biomedical applications. Experimental validation confirms the reliability and precision of this proof-of-concept device in airflow measurement. [2024-0148]

I. Introduction

Recently, lung-related diseases have ranked among the leading causes of death globally [1], [2], [3]. These diseases include chronic obstructive pulmonary disease (COPD), asthma, lung cancer, pneumonia, and COVID-19. Traditional diagnostic techniques for these conditions rely on gold-standard methods utilizing commercial devices, primarily in hospital settings. However, the severe risk of disease transmission in hospitals [4], [5], [6] highlights the critical need for early diagnosis and precautionary measures using point-of-care and disposable devices. Such devices are essential for improving public health by minimizing the risk of transmission and enabling timely detection and management of chronic respiratory conditions.