Loading [MathJax]/extensions/TeX/mhchem.js
The Value of In-Line Metrology for Advanced Process Control: AM: Advanced Metrology | IEEE Conference Publication | IEEE Xplore

The Value of In-Line Metrology for Advanced Process Control: AM: Advanced Metrology


Abstract:

In-line metrology provides critical information for feedback and feedforward process control. In high-volume manufacturing, the fundamental question is: how fast, how fre...Show More

Abstract:

In-line metrology provides critical information for feedback and feedforward process control. In high-volume manufacturing, the fundamental question is: how fast, how frequent, and how accurate measurements should be made to satisfy control requirements. This paper develops a framework to study the tradeoff among the sampling rate, the delay, and the quality of measurements and the effect of these canonical factors on the variability of processes. As a consequence of this fundamental tradeoff, the relative value of virtual metrology with respect to real metrology can be quantified in the context of advanced process control.
Date of Conference: 13-16 May 2024
Date Added to IEEE Xplore: 06 June 2024
ISBN Information:

ISSN Information:

Conference Location: Albany, NY, USA

References

References is not available for this document.