Abstract:
This paper is dedicated to the design, fabrication and characterization of MEMS electrostatic actuators. Two types of electrostatic MEMS actuators are described in detail...Show MoreMetadata
Abstract:
This paper is dedicated to the design, fabrication and characterization of MEMS electrostatic actuators. Two types of electrostatic MEMS actuators are described in detail: The first is a digital (8-bit) actuator, with bit-by-bit control of voltage and displacement. It is concepted for a linear drive characteristic, a large travel range of up to 4 µm with a driving voltage of less than 30 V. The second analogue actuator is designed to operate with the same driving voltage, has a smaller travel range (about 1.5 µm), however has a built-in capacitive displacement sensor. Both actuators are designed to precisely control a MEMS optical sensor, part of a MEMS-based, highly miniaturised and mobile spectrometer for the analysis of gases and gas mixtures.
Date of Conference: 07-10 April 2024
Date Added to IEEE Xplore: 09 April 2024
ISBN Information: