I. Introduction
High precision motion control systems play an important role in many domains like robotics [1], lithography [2], and many more [3]. They perform fast and accurate tracking of a predefined reference signal [1], e.g., motion path. Feedforward tracking controllers are commonly used to achieve this high precision [4]. In such control structures, a feedback component ensures the stability of the closed loop system, and the feedforward component enables the reference tracking [5].