Abstract:
We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic tr...Show MoreMetadata
Abstract:
We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.
Published in: 2014 IEEE International Ultrasonics Symposium
Date of Conference: 03-06 September 2014
Date Added to IEEE Xplore: 23 October 2014
ISBN Information:
Print ISSN: 1051-0117
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