Abstract:
The modeling, construction and characterization of a piezoresistive areo-acoustic microphone are reported. The piezoresistors are fabricated on single-crystal silicon tha...Show MoreMetadata
Abstract:
The modeling, construction and characterization of a piezoresistive areo-acoustic microphone are reported. The piezoresistors are fabricated on single-crystal silicon that has been transferred to a deposited low-stress silicon nitride sensing diaphragm. The measured resonance frequency and sensitivity are 520 kHz and 0.6 muV/V/Pa, respectively.
Published in: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
Date of Conference: 21-25 June 2009
Date Added to IEEE Xplore: 13 October 2009
ISBN Information:
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