Abstract:
The origins of parameters deviation for MEMS, made in a MEMS and microtechnology research laboratory are analyzed. The relationship between the technology size deviation ...Show MoreMetadata
Abstract:
The origins of parameters deviation for MEMS, made in a MEMS and microtechnology research laboratory are analyzed. The relationship between the technology size deviation and the bare resonance mode is obtained, and the MEMS gyro sensitivity threshold is estimated.
Published in: 2003 Siberian Russian Workshop on Electron Devices and Materials. Proceedings. 4th Annual (IEEE Cat. No.03EX664)
Date of Conference: 01-04 July 2003
Date Added to IEEE Xplore: 04 September 2003
Print ISBN:5-7782-0412-4
Contents 