Large-Scale Carbon Nanowall Synthesis Using Upgraded ReSLAN Plasma Source

We synthesized carbon nanowall (CNW) films on a copper substrate using an upgraded ReSLAN plasma source. The morphology and structural characteristics of CNWs synthesized according to the position of the copper substrate (XY plane and ZX plane) were analyzed using FE-SEM and Raman spectroscopy. When synthesized in the ZX plane, it was possible to achieve a surface area synthesis of 450 mm, but the uniformity of the CNWs film synthesized between the slits and magnets was low. The CNW film synthesized in the XY plane had a smaller area, approximately $60\times240$ mm, compared to the ZX plane synthesis, but it exhibited a very good uniformity with a graphitization uniformity of 5.8%. We propose a roll-to-roll process system for continuous CNWs synthesis to be conducted in the future.