Micromechanical thermal converter of power alternating current

The microconverter construction and its fabrication process route designed. The approaching technological materials are selected. The heat fluxes and electrical performances simulations of the device are worked out. All fabrication operations, according to a process route are developed. Experimental samples are explored and results compared with a performance of secondary etalon. On the basis of obtained data the indispensable changes are introduced in to the microconverter construction. The upgraded thermoelectric converter at present of time is made according to an improved process route.