Semi-Analytical Magneto-Mechanic Coupling With Contact Analysis for MEMS/NEMS

This paper presents a methodology and a tool for magnetic and mechanical deformation coupling using numerical and analytical modeling. An analytical magnetic model using Coulombian approach is used and coupled with a mechanical deformation model for a cantilever beam to evaluate contact size and contact force. Such a coupling is not available using numerical solution. This paper details the deformation and contact analysis, which is validated by finite element simulation and also details the coupling approach. Such a modeling is dedicated to an optimization process of magnetic MEMS/NEMS in general and to magnetic nano switch in particular.