The Dose Effect in Secondary Electron Emission

In this paper, total incident electron dose as an inherent parameter in secondary electron emission is experimentally demonstrated. A completely automated experimental setup allows for measuring of secondary electron yield (SEY) as a function of beam energy, angle of incidence of primary electrons, electron dose, and time. SEY data are presented for copper, plasma-sprayed boron carbide, and titanium nitride samples with principal focus on dose dependence. Experiments were conducted in the low-energy range (5–1000 eV) and direct-current regime. Experimental results have been compared with formulas in literature, and good agreement was observed. Modified empirical formulas incorporating the dose effect have also been proposed.