Investigation and Analysis of Mismatching Properties for Nanoscale Strained MOSFETs

This paper investigates and analyzes the matching properties of nanoscale strained MOSFETs under various bias conditions. Through a comprehensive comparison between coprocessed strained and unstrained PMOSFETs, the impact of process-induced uniaxial strain on the matching performance of MOS devices has been assessed and analyzed. Our examination indicates that, in the low-gate-voltage-overdrive (|V
_gst
|) regime, the normalized drain current mismatch (¿(¿I
_d
)/I
_d
) of the strained device is almost the same as that of the unstrained one at a given transconductance to drain current ratio (
g

_m
/l
_d
). In the high |V
_gst
| linear regime, the ¿(¿I
_d
)/I
_d
for the strained device is smaller than that of the unstrained one because of its smaller normalized current factor mismatch. In the high |V
_gst
| saturation regime, the improvement in the ¿(¿I
_d
)/I
_d
for the strained device is further enhanced because of the reduced critical electric field at which the carrier velocity becomes saturated.