Design and Simulation of an Integrated Metal Oxide Based Micro NO2 Gas Sensor

In this paper, a novel design of metal-oxide NO
₂
gas sensor integrated with micro heaters is presented. This gas sensor is ultra small, with the size of 500mumtimes500mum. It has low power consumption less than 10 mW and high sensitivity up to 0.1ppm. The structure of gas sensor was designed, and computer-aided multi-physic simulations were carried out to analyze and optimize the performance of the gas sensor. Then the sensing circuit is designed and simulated. Finally, the fabrication process of the sensor is discussed