XY-Stage for Scanning Media for Optical Data Storage

XY-stage driven by the electrostatic comb-drive actuator is fabricated realizing long displacement. The actuator is fabricated in one layer of silicon-on-insulator (SOI) wafer, and the media plate is in the other layer. The raster scanning of the plate is realized maintaining orthogonal xy-directions. The fast scanning is y-axis. Two 820times950 mum
²
-size media plates are driven at the opposite y directions canceling the inertia force. The static maximum displacements are 110 mum (geometrical limit) along x-axis and 90 mum along y-axis. At the resonance, 115 mum (geometrical limit) is obtained along y-axis