# Journal of Microelectromechanical Systems

## Filter Results

Displaying Results 1 - 25 of 34

Publication Year: 2012, Page(s):C1 - C4
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• ### Journal of Microelectromechanical Systems publication information

Publication Year: 2012, Page(s): C2
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• ### Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing

Publication Year: 2012, Page(s):509 - 510
Cited by:  Papers (17)  |  Patents (1)
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We report, for the first time, experimental demonstration of a 3-D spherical shell resonator microelectromechanical systems gyroscope fabricated using wafer-scale glassblowing. The gyroscope utilizes a 1-mm-diameter 10-μm-thick spherical isotropic shell surrounded by eight cofabricated satellite spheres serving as actuation and detection electrodes. To demonstrate functionality of the new d... View full abstract»

• ### Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes

Publication Year: 2012, Page(s):511 - 513
Cited by:  Papers (21)
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The impact of device operating parameters on the ON-state resistance (RON) of microelectromechanical relays with tungsten (W) electrodes is reported. Due to the susceptibility of W to oxidation, RON increases undesirably over the device operating cycles. This issue is aggravated by Joule heating when the relay is in the on state. The experimental results confirm... View full abstract»

• ### Linear-Stiffness Rotary MEMS Stage

Publication Year: 2012, Page(s):514 - 516
Cited by:  Papers (2)
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A novel bending flexure spring design is presented, providing linear stiffness for large rotations of a suspended body. Over 98% linear motion for up to ±7° mechanical scan angle is achievable with the new suspension design. View full abstract»

• ### Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic Sensor

Publication Year: 2012, Page(s):517 - 519
Cited by:  Papers (3)
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In this letter, we report a novel wet etching technique of a c -axis-oriented ZnO film that solves the step coverage problem during formation of electrodes on this film. The negative profile or hanging structure of ZnO film deposited by RF magnetron sputtering was obtained during wet etching in HCl and NH4Cl solutions. The developed technique uses aqueous NH4Cl with el... View full abstract»

• ### Experimental Technique for Fatigue Testing of MEMS in Liquids

Publication Year: 2012, Page(s):520 - 522
Cited by:  Papers (5)
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An experimental technique for the fatigue testing of microelectromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 10... View full abstract»

• ### Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to $hbox{C}_{60}$ Nanowire Testing

Publication Year: 2012, Page(s):523 - 529
Cited by:  Papers (12)
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In this paper, we report a test stand device for tensile testing nanoscale materials and its application to testing of a fullerene wire. We have developed an electrostatic microelectromechanical-systems tensile testing device which has a comb drive actuator to apply tensile force to a specimen and two capacitances for sensing the displacement to measure the elongation and applied force of the spec... View full abstract»

• ### Three-Dimensional Surface Profile Measurement of Microlenses Using the Shack–Hartmann Wavefront Sensor

Publication Year: 2012, Page(s):530 - 540
Cited by:  Papers (6)
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We present a 3-D surface profiling method for microlenses that utilizes a Shack-Hartmann wavefront sensor. This method applies to both solid microlenses and liquid-liquid interfaces in liquid microlenses. The wavefront at the aperture stop of a microlens is measured by a Shack-Hartmann wavefront sensor and is then used to calculate the 3-D surface profile of the microlens. Three types of microlens... View full abstract»

• ### Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures

Publication Year: 2012, Page(s):541 - 548
Cited by:  Papers (10)
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New microstructures for the measurement of the interfacial adhesion force between polycrystalline silicon surfaces in micro- and nanoelectromechanical systems and at elevated temperatures are introduced. The devices consist of bilayer cantilever beams with different coefficients of thermal expansion, which carry a rigid plate with a dimple as one of the contacting surfaces. A landing pad patterned... View full abstract»

• ### Modeling, Analysis, and Experimental Validation of a Bifurcation-Based Microsensor

Publication Year: 2012, Page(s):549 - 558
Cited by:  Papers (11)  |  Patents (1)
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The potential to detect very small amounts of added mass has driven research in chemical and biological sensors based on resonant micro- and nanoelectromechanical systems over the past two decades. While traditional resonant mass sensors utilize chemomechanically induced shifts in linear natural frequency for mass detection, alternate sensing approaches which exploit near-resonant nonlinear behavi... View full abstract»

• ### Dielectric Charge Control in Electrostatic MEMS Positioners/Varactors

Publication Year: 2012, Page(s):559 - 573
Cited by:  Papers (16)
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A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is... View full abstract»

• ### Pushing the Limits for Microactuators Based on Electroactive Polymers

Publication Year: 2012, Page(s):574 - 585
Cited by:  Papers (14)
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We have previously reported on the fabrication and displacement output of electroactive polymer (EAP) microactuators less than 1 mm in length. The main limiting factor hindering their further miniaturization and their displacement output was the thickness of the commercially available polyvinylidene fluoride (PVDF) membrane used (~ 110 μm). In this study, we have reduced the thickness of th... View full abstract»

• ### Improved Designs for an Electrothermal In-Plane Microactuator

Publication Year: 2012, Page(s):586 - 595
Cited by:  Papers (14)  |  Patents (1)
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Reported presently are two design approaches to improve the performance of an electrothermal in-plane microactuator with “chevron” beams. One incorporates beams with uniform cross sections but nonuniform lengths or tilt angles to accommodate the thermally induced expansion of the “shuttle”; the other incorporates beams with nonuniform cross sections to widen the high-te... View full abstract»

• ### Z-Shaped MEMS Thermal Actuators: Piezoresistive Self-Sensing and Preliminary Results for Feedback Control

Publication Year: 2012, Page(s):596 - 604
Cited by:  Papers (17)
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Feedback control of microactuators holds potential to significantly improve their performance and reliability. A critical step to realize the feedback control of microactuators is feedback sensing. In this paper, we report the feasibility of using a Z-shaped thermal actuator (ZTA) as a simultaneous force or displacement sensor. An in situ scanning electron microscope nanomanipulation process is us... View full abstract»

• ### High-Angular-Range Electrostatic Rotary Stepper Micromotors Fabricated With SOI Technology

Publication Year: 2012, Page(s):605 - 620
Cited by:  Papers (5)
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Flexible bearings are advantageous for microelectromechanical systems as they enable precise, accurate, repeatable, and reliable motion without frictional contact. Based on the principle of a rotary folded-beam suspension, we have designed, fabricated, modeled, and characterized an electrostatic rotary stepper micromotor in silicon. Using 3-D finite-element analysis simulations that were corrobora... View full abstract»

• ### Mechanics of Out-of-Plane MEMS via Postbuckling: Model-Experiment Demonstration Using CMOS

Publication Year: 2012, Page(s):621 - 634
Cited by:  Papers (2)
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A novel approach to out-of-plane microelectromechanical systems (MEMS) is demonstrated where elements are designed in the postbuckling regime, exploiting buckling phenomena and residual-stress control to create functional elements that extend significantly out of the wafer plane. An analytical tool for out-of-plane MEMS design is presented, based on nonlinear postbuckling of layered structures, in... View full abstract»

• ### Micromachined Tactile Sensor for Soft-Tissue Compliance Detection

Publication Year: 2012, Page(s):635 - 645
Cited by:  Papers (15)
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Compliance detection becomes very essential in minimally invasive surgery (MIS). It can help in detection of cancerous lumps and/or for deciding on tissue healthiness. In this paper, a micromachined piezoresistive tactile sensor, with two serpentine springs and 500-μm cubic mesas, has been designed for detecting the compliance of soft tissue independent of the applied distance between the s... View full abstract»

• ### Sensitivity Improvement of Micromachined Convective Accelerometers

Publication Year: 2012, Page(s):646 - 655
Cited by:  Papers (7)
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The sensitivity of a micromachined convective accelerometer filled with different gases at various conditions is theoretically and experimentally investigated. It is shown that the sensitivity of the accelerometer is proportional to the Rayleigh number for the contained gas. The Rayleigh numbers for nine gases are calculated, and the corresponding sensitivity improvements are predicted. To test ou... View full abstract»

• ### Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Publication Year: 2012, Page(s):656 - 667
Cited by:  Papers (38)  |  Patents (4)
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This paper presents experimental data about the sources of the quadrature error in a fully decoupled microelectromechanical systems gyroscope and demonstrates the extent of performance improvement by the cancellation of this error. Quadrature sources including mass, electrostatic-force, and mechanical-spring imbalances have been compared by FEM simulations, and spring imbalance has been found as t... View full abstract»

• ### Double-SOI Wafer-Bonded CMUTs With Improved Electrical Safety and Minimal Roughness of Dielectric and Electrode Surfaces

Publication Year: 2012, Page(s):668 - 680
Cited by:  Papers (18)
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Despite myriad potential advantages over piezoelectric ultrasound transducers, capacitive micromachined ultrasound transducers (CMUTs) have not yet seen widespread commercial implementation. The possible reasons for this may include key issues of the following: (1) long-term device reliability and (2) electrical safety issues associated with relatively high voltage electrodes on device surfaces wh... View full abstract»

• ### Doping-Induced Temperature Compensation of Thermally Actuated High-Frequency Silicon Micromechanical Resonators

Publication Year: 2012, Page(s):681 - 687
Cited by:  Papers (14)  |  Patents (1)
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Temperature compensation of thermally actuated high-frequency single crystalline silicon micromechanical resonant structures via high concentration n-type doping has been demonstrated in this paper. The effect of doping level, structural dimensions, and bias current on temperature coefficient of frequency (TCF) for such resonators has also been investigated. It has been shown that the large negati... View full abstract»

• ### High-$Q$ Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning

Publication Year: 2012, Page(s):688 - 701
Cited by:  Papers (22)  |  Patents (1)
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Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to enable deep-submicrometer electrode- to-resonator gap spacing without interference in their mechanical boundary conditions (BCs) have been demonstrated simultaneously with low motional impedance and high Q. The key to attaining high Q relies on a decoupling design between pull-in frames for gap reduction and mechanical BCs o... View full abstract»

• ### Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation

Publication Year: 2012, Page(s):702 - 711
Cited by:  Papers (18)
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Microelectromechanical systems (MEMS)-based resonant mass sensors have been extensively studied due to their high sensitivity and small size, making them very suitable for detecting micro- or nanosized particles, as well as monitoring microscaled physical processes. In a range of physical and biological applications, accurate estimation and precise control of the evaporation process of microdrople... View full abstract»

• ### Wetting and Active Dewetting Processes of Hierarchically Constructed Superhydrophobic Surfaces Fully Immersed in Water

Publication Year: 2012, Page(s):712 - 720
Cited by:  Papers (14)
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When a superhydrophobic (SHPo) surface is fully submerged underwater, the surface becomes wet eventually and cannot recover the SHPo state naturally. In this paper, we fabricate hydrophobic microposts on a hydrophobic nanostructured substrate, i.e., hierarchically structured SHPo surfaces, and investigate their wetting and dewetting processes while immersed in water. All the micropost surfaces get... View full abstract»

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

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## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems