Early Access ArticlesEarly Access articles are made available in advance of the final electronic or print versions. Early Access articles are peer reviewed but may not be fully edited. They are fully citable from the moment they appear in IEEE Xplore.
In the semi-conductor industry, factories ramp their production capacity in parallel with tool (machine) installations. Ramp capacity, and subsequently wafer starts, are aligned with additional installs of the most expensive tool. Subsequently, starts are set to the full capacity of that limiting toolset. In this paper, we argue that this may not be best method to maximize output over the ramp per... View full abstract»
Just-In-Time Modeling with Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing
Virtual metrology (VM) is often applied in semiconductor manufacturing when process measurements cannot be obtained without delay or without impacting the cycle time. When the process condition is varying, the modeling results can be inaccurate if a single VM model is adopted. Also, the large number of variables in the process data increases the difficulty of obtaining good predictions. To improve... View full abstract»
Aims & Scope
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components.
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