Scheduled System Maintenance
On Tuesday, May 22, IEEE Xplore will undergo scheduled maintenance. Single article sales and account management will be unavailable
from 6:00am–5:00pm ET. There may be intermittent impact on performance from noon–6:00pm ET.
We apologize for the inconvenience.

IEEE Transactions on Semiconductor Manufacturing

Early Access Articles

Early Access articles are made available in advance of the final electronic or print versions. Early Access articles are peer reviewed but may not be fully edited. They are fully citable from the moment they appear in IEEE Xplore.

Filter Results

Displaying Results 1 - 2 of 2
  • Maximizing Output during Ramp by Integrating Capacity and Velocity

    Publication Year: 2018, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (926 KB)

    In the semi-conductor industry, factories ramp their production capacity in parallel with tool (machine) installations. Ramp capacity, and subsequently wafer starts, are aligned with additional installs of the most expensive tool. Subsequently, starts are set to the full capacity of that limiting toolset. In this paper, we argue that this may not be best method to maximize output over the ramp per... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.
  • Just-In-Time Modeling with Variable Shrinkage Based on Gaussian Processes for Semiconductor Manufacturing

    Publication Year: 2018, Page(s): 1
    Request permission for commercial reuse | Click to expandAbstract | PDF file iconPDF (460 KB)

    Virtual metrology (VM) is often applied in semiconductor manufacturing when process measurements cannot be obtained without delay or without impacting the cycle time. When the process condition is varying, the modeling results can be inaccurate if a single VM model is adopted. Also, the large number of variables in the process data increases the difficulty of obtaining good predictions. To improve... View full abstract»

    Full text access may be available. Click article title to sign in or learn about subscription options.

Aims & Scope

The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components.

Full Aims & Scope

Meet Our Editors

Editor-in-Chief
Reha Uzsoy, Ph.D., P.E.
Clifton A. Anderson Distinguished Professor
Edward P. Fitts Department of Industrial and Systems Engineering
300 Daniels Hall
Campus Box 7906
North Carolina State University
Raleigh, NC 27695-7906
phone: (919) 513-1681
fax: (919) 515-5281
ruzsoy@ncsu.edu

Publications Office Contact
Rosemary Schreiber
445 Hoes Lane
Piscataway, NJ 08854 USA
r.schreiber@ieee.org