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Volume 30 Issue 11 • Nov. 1983
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Previous Titles
- ( 1955 - 1962 ) IRE Transactions on Electron Devices
- ( 1952 - 1954 ) Transactions of the IRE Professional Group on Electron Devices
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Changes in the editorial board
Publication Year: 1983, Page(s): 1436 -
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VLSI Process modeling—SUPREM III
Publication Year: 1983, Page(s):1438 - 1453
Cited by: Papers (71) | Patents (1)Over the past several years, the process-simulation tool SUPREM II has proven useful in the design and optimization of both bipolar and MOS technologies. This paper describes a new and significantly more capable version of the program--SUPREM III--which incorporates process models suitable for VLSI device design. This new version of the program is now generally available and should provide a power... View full abstract»
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Verification of models for fabrication of Arsenic source-drains in VLSI MOSFET's
Publication Year: 1983, Page(s):1453 - 1462
Cited by: Papers (4)The understanding of the effects of both low- and high-temperature anneals of arsenic implanted into silicon is critical in the calculation of p-n junction profiles of sources and drains in short-channel MOSFET's. The work reported here uses a sample matrix of arsenic implanted into silicon over a wide range of fluences and annealed in both the low- and high-temperature regimes. This matrix of sam... View full abstract»
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Two-dimensional simulation of a 2-µm CMOS process using ROMANS II
Publication Year: 1983, Page(s):1462 - 1469
Cited by: Papers (5)To accurately simulate processes applicable to fine-line geometry devices and VLSI circuits with feature size approaching 1 µm, a new two-dimensional process simulator program called ROMANS II (Redistribution and Oxidation Modeling ANalysis by Simulation in II dimensions) has been developed. This paper reports on the application of this program to simulate the thermal redistribution of the bo... View full abstract»
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Topography-dependent electrical parameter simulation for VLSI design
Publication Year: 1983, Page(s):1469 - 1474
Cited by: Papers (1)A postprocessor for calculating the step crossing resistance and interlayer capacitance from device cross sections from SAMPLE simulation or SEM profiles is presented. An approximate curvilinear square algorithm is used for rapid evaluation of the two-dimensional equivalent number of lateral squares to an accuracy of a few percent. Studies of resistance for single steps and linear gaps are used to... View full abstract»
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Contrast studies in high-performance projection optics
Publication Year: 1983, Page(s):1474 - 1479
Cited by: Papers (3) | Patents (15)Image contrast is a simple physical parameter for estimating performance Of optical systems using positive photoresist. Measurements of image contrast are reported on a variety of single and multi-wavelength projection aligners, and compared with theoretical predictions. On the best systems the dark field contrast approaches the theoretical (diffraction limited) contrast within an equivalent defoc... View full abstract»
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Refractory metal silicides: Thin-film properties and processing technology
Publication Year: 1983, Page(s):1480 - 1497
Cited by: Papers (10) | Patents (12)The thin-film properties of refractory metal silicides are reviewed along with related VLSI process technology. Material considerations, including thin-film deposition techniques, film structure, electrical properties, are covered. Single-level and composite gate structures implemented with these silicides are described. Thin-film processing-plasma etching, thermal oxidation, ion-beam-enhanced sil... View full abstract»
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Properties of low-pressure CVD tungsten silicide for MOS VLSI interconnections
Publication Year: 1983, Page(s):1497 - 1505
Cited by: Papers (22) | Patents (13)Low-pressure chemical vapor deposition of tungsten silicide has been done and the properties of the deposited films have been studied to determine the process compatibility and suitability to form gate electrodes and interconnections in MOS VLSI applications. The silicide was deposited on single-crystal silicon and on oxidized silicon with and without a coating of polycrystalline silicon film. Aug... View full abstract»
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The sloped-wall SWAMI—A defect-free zero bird's-beak local oxidation process for scaled VLSI technology
Publication Year: 1983, Page(s):1506 - 1511
Cited by: Papers (24) | Patents (10)A new scheme for a Side WAll Masked Isolation (SWAMI) process is presented which takes all the advantages provided by LOCOS without suffering its difficulties. The new SWAMI technology incorporates a sloped silicon sidewall and a thin nitride layer around the island sidewalls such that both intrinsic nitride stress and volume expansion-induced stress are greatly reduced. A defect-free fully recess... View full abstract»
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Selective low-pressure silicon epitaxy for MOS and bipolar transistor application
Publication Year: 1983, Page(s):1511 - 1515
Cited by: Papers (3) | Patents (6)The selective low-pressure epitaxy is presented in this paper. In contrast to LOCOS technology, this process starts with structuring a thick field oxide by anisotropic RIE etching. Then monocrystalline silicon is grown selectively in the windows formed. Si-gate MOS transistors have been produced using this technology. In the field of bipolar transistors, reactive ion etching and selective low-pres... View full abstract»
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CMOS on buried nitride—A VLSI SOI technology
Publication Year: 1983, Page(s):1515 - 1520
Cited by: Papers (9) | Patents (2)A CMOS technology in silicon on insulator (SOI) for VLSI applications is presented. The insulator is a buried silicon nitride formed by nitrogen implantation and annealing. The CMOS devices are fabricated in the superficial monocrystalline silicon layer without an epitaxial process, 1-µm PMOS and 2-µm NMOS transistors have been realized, which have been used to built inverters, ring Osci... View full abstract»
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A novel self-aligned isolation process for VLSI
Publication Year: 1983, Page(s):1521 - 1527
Cited by: Papers (3)We have developed a novel NMOS process for VLSI isolation. The process employs an RIE of the field oxide followed by a metal liftoff and a high-energy boron sheet implant. The energy of the implant and the metal thickness are selected such that the boron penetrates the field oxide, but not the metal. Performing the isolation doping after growing the field oxide eliminates encroachment of the isola... View full abstract»
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Tunneling in base-emitter junctions
Publication Year: 1983, Page(s):1527 - 1534
Cited by: Papers (55) | Patents (1)Tunneling currents in reverse-biased base-emitter junctions are investigated and analyzed. Guided by a simple analytic theory, shallow n+-p junctions are designed with a variety of different concentration profiles. Measurements of the dc electrical characteristics indicate a significant Zener tunneling component in the reverse diode current. The appearance of tunneling is ascertained by... View full abstract»
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Direct measurements of interfacial contact resistance, end contact resistance, and interfacial contact layer uniformity
Publication Year: 1983, Page(s):1535 - 1542
Cited by: Papers (144) | Patents (1)A four-terminal microelectronic test structure and test method are described for electrically determining the degree of uniformity of the interfacial layer in metal-semiconductor contacts and for directly measuring the interfacial contact resistance. A two-dimensional resistor network model is used to obtain the relationship between the specific contact resistance and the measured interfacial cont... View full abstract»
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The use of refractory metal and electron-beam sintering to reduce contact resistance for VLSI
Publication Year: 1983, Page(s):1542 - 1550
Cited by: Papers (4)Low contact resistance for metal on silicon is particularly important for VLSI where contact dimensions become ≤1 µm. This paper reports on e-beam sintering of refractory metal contacts on implanted n+- and p+-silicon layers. With this technique, we have obtained contact resistivities as low as 1.5 × 10-7Ω. cm2and 1.2 × 10-... View full abstract»
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Rapid electron-beam isothermal processing of arsenic-implanted NMOS devices
Publication Year: 1983, Page(s):1550 - 1555
Cited by: Papers (2)Rapid isothermal annealing by the multiple-scan electron-beam method has been used to anneal arsenic-implanted resistors, diodes, and NMOS transistors. The method potentially provides independent control of activation and diffusion of the dopant. Resistors are shown to have sheet resistances close to expected values for the implant, diodes have very low leakage currents, and both long- and short-c... View full abstract»
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I-1 fine line MOS technology for high speed integrated circuits
Publication Year: 1983, Page(s): 1564
Cited by: Papers (1) -
I-2 device performance of high speed III-V semiconductor devices
Publication Year: 1983, Page(s): 1564 -
I-3 recent development and future trends in latchup prevention in scaled CMOS
Publication Year: 1983, Page(s):1564 - 1565 -
IIA-1 (GaAl)As/GaAs heterojunction dipolar transistors with graded composition in the base
Publication Year: 1983, Page(s):1565 - 1566 -
I-4 gain and loss processes in InGaAsP/InP DH lasers
Publication Year: 1983, Page(s): 1565 -
IIA-2 double heterojunction Al
Publication Year: 1983, Page(s): 15660.5 Ga0.5 As/GaAs bipolar transistors with improved interfaces
Aims & Scope
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects.
Meet Our Editors
Editor-in-Chief
Giovanni Ghione
Politecnico di Torino,
10129 Torino, Italy
Phone +39 011 090 4064
email giovanni.ghione@polito.