# Journal of Microelectromechanical Systems

## Issue 1 • Feb. 2019

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## Filter Results

Displaying Results 1 - 22 of 22

Publication Year: 2019, Page(s):C1 - C4
| PDF (328 KB)
• ### Journal of Microelectromechanical Systems

Publication Year: 2019, Page(s): C2
| PDF (84 KB)
• ### MEMS-Based Thermoelectric–Photoelectric Integrated Power Generator

Publication Year: 2019, Page(s):1 - 3
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This letter presents a novel MEMS-based thermoelectric–photoelectric power generator, which integrates a micro-scale thermoelectric generator ( $\mu$ -TEG) and a solar cell on a single silicon chip by MEMS technology for the first time. To optimize the heat flux path of $\mu$ View full abstract»

• ### Piezoelectric-Based Support Transducer Design to Enable High-Performance Bulk Mode Resonators

Publication Year: 2019, Page(s):4 - 13
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An innovative topology to realize high-performance bulk mode devices made up of low-defect material by driving them into resonance using piezoelectric thin-film transduction is proposed and implemented in this paper. Here, the piezoelectric transducer is uniquely positioned at the bulk mode’s support location. To realize the resonators, MEMSCAP Inc.’s PiezoMUMPS platform was utilized. Wine-glass a... View full abstract»

• ### In-Plane High-Sensitivity Capacitive Accelerometer in a 3-D CMOS-Compatible Surface Micromachining Process

Publication Year: 2019, Page(s):14 - 24
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This paper proposes a novel design for a 3-D, high-sensitivity, single-axis lateral capacitive accelerometer. The accelerometer utilizes the entire area of the sensor for both sensing and the proof mass, which mitigates the tradeoffs often needed in conventional 2-D designs. The accelerometer structure is optimized to target the highest possible performance. Innovative Z-shaped supporting beams ar... View full abstract»

• ### MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness

Publication Year: 2019, Page(s):25 - 35
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We report on a new design approach for X-Y symmetric resonator, emphasizing the increase in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis rate gyroscope (RG), and the concept is compatible with the rate-integrating gyroscope mechanization. Our approach is based on strategically placing the critical mechanical elements at the center of the resonator structu... View full abstract»

• ### Parylene-Based Cuff Electrode With Integrated Microfluidics for Peripheral Nerve Recording, Stimulation, and Drug Delivery

Publication Year: 2019, Page(s):36 - 49
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A novel Parylene C-based peripheral nerve interface that combines both electrodes and microfluidic channels in an adjustable cuff was designed, fabricated, and characterized. This minimally invasive interface incorporates a drug delivery system for targeted delivery of lysing agents and neurotrophic factors to the nerve surface to locally disrupt the epineurium and allow fascicular selectivity. Mu... View full abstract»

• ### Precision Plating of Human Electrogenic Cells on Microelectrodes Enhanced With Precision Electrodeposited Nano-Porous Platinum for Cell-Based Biosensing Applications

Publication Year: 2019, Page(s):50 - 62
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Microelectrode Arrays are established platforms for biosensing applications; however, limitations in electrode impedance and cell-electrode coupling still exist. In this paper, the SNR of $25~\mu \text{m}$ diameter gold (Au) microelectrodes was improved by decreasing the impedance with precision electrodeposition. SEM determi... View full abstract»

• ### 3-D Isotropic Tactile Microprobe Based on a Silicon Parallelogram Kinematic: From Concept to Fabrication

Publication Year: 2019, Page(s):63 - 76
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This paper reports on a unique tactile microprobe based on a parallelogram kinematic made from monocrystalline silicon. This kinematic, made out of an orthogonal cascade assembly of three identical parallelograms, provides an isotropic behavior to the microprobe. Each parallelogram deflects in only one direction thanks to thin elastic silicon membrane hinges and their displacements are recognized ... View full abstract»

• ### Frequency Tuning and Efficiency Improvement of Piezoelectric MEMS Vibration Energy Harvesters

Publication Year: 2019, Page(s):77 - 87
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Although lots of efforts have been made to produce the optimal piezoelectric MEMS vibration energy harvesters in the past decade, the state-of-the-art study is still dependent on the designers’ discretion, which demands a considerable amount of design time to gain optimum structure. In this paper, we propose a new design automation technique with minimum human effort based on a genetic algorithm (... View full abstract»

• ### Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration

Publication Year: 2019, Page(s):88 - 94
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We present a new technique to produce liquid metal spheres with customized diameters using electromigration. The liquid metal used is a versatile material, which is increasingly implemented in micromanipulation applications. The theories of mass transport activated by electromigration are compared with experimental results. The knowledge gained from the theory is used to optimize this method. Ther... View full abstract»

• ### Optimization and Contact Reliability of TiN-Coated Microswitches in Various Gas Environments

Publication Year: 2019, Page(s):95 - 106
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Titanium nitride (TiN) is of interest as a material in MEMS and NEMS switches due to its high hardness, low-surface energy, good electrical conductivity, and resistance to chemical oxidation. We perform extensive characterization of TiN for microswitches. We optimize process parameters to attain low resistivity ( $60~\mu \Omega \cdot \text {cm}$ View full abstract»

• ### Analysis of Thermally Actuated RF-MEMS Switches for Power Limiter Applications

Publication Year: 2019, Page(s):107 - 113
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This paper presents a multiphysics analysis of thermally actuated RF MEMS switches for use in power limiter applications. RF MEMS switches can self-actuate when operating under high RF power levels. The level of power at which the switch actuates, can be varied by controlling the applied dc actuation voltage. MEMS switches are, therefore, proposed for use in power limiter applications. The objecti... View full abstract»

• ### Semi-Packed Gas Chromatography Columns With Density Modulated Pillars

Publication Year: 2019, Page(s):114 - 124
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The separation column is the most important component which influences the performance of gas chromatography systems. Among a number of column designs, the microfabricated semi-packed column has attracted particular attention in micro gas chromatography because it enhances the separation efficiency and provides higher sample capacity compared to the open-channel counterparts. However, these added ... View full abstract»

• ### Configuration of a Self-Heated Double Wheatstone Bridge for 2-D Wind Sensors

Publication Year: 2019, Page(s):125 - 130
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A self-heated double Wheatstone bridge configuration for a 2-D wind sensor is presented. Without a central heating element, eight thermistors are symmetrically arranged in two orthogonal directions, and four of them in each direction make up a Wheatstone bridge. The eight thermistors simultaneously act as the heating sources and temperature sensing elements. By applying the constant current supply... View full abstract»

• ### Thick High Aspect-Ratio Biomimetic Silicon Hair Sensors as Accelerometers

Publication Year: 2019, Page(s):131 - 142
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In nature, hair typically exists in large-scale arrays, offering improved sensitivity and dynamic range. In this paper, we present a new high aspect-ratio (HAR) hair biomimetic microstructure used as an accelerometer and it consists of a vertically anchored hair-like spring with a proof-mass attached to the top of it and made from thick silicon. Silicon structures mimicking hair, fabricated by MEM... View full abstract»

• ### Uniform Metal-Assisted Chemical Etching for Ultra-High-Aspect-Ratio Microstructures on Silicon

Publication Year: 2019, Page(s):143 - 153
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Recently, uniform metal-assisted chemical etching (UMaCE) has been demonstrated as an effective wet etch method for fabrication of deep trenches and holes on silicon (Si). However, attempts to achieve higher aspect ratio by UMaCE was not successful because etching in random directions was observed. In this paper, the etching uniformity in UMaCE is systematically studied at different etching soluti... View full abstract»

• ### Highly Sensitive and Flexible Tactile Sensor Based on Porous Graphene Sponges for Distributed Tactile Sensing in Monitoring Human Motions

Publication Year: 2019, Page(s):154 - 163
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This paper presents a highly sensitive and flexible tactile sensor based on 3D microstructure graphene sponges. The graphene sponges are fabricated in a dip-coating process that stacks the graphene layers onto the polyimide scaffolds in a homogeneous graphene solution with graphene oxide serving as the dispersant. The tactile sensor has $3 \times 3$ View full abstract»

• ### A Microfabricated Transparent Capacitor for Sensing Ethanol

Publication Year: 2019, Page(s):164 - 169
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The development of new sensing platforms could offer exciting opportunities for healthcare and environmental applications. In the last few decades, sensor device configurations have been limited owing to the use of electrochemical electrodes, resistors, and transistors. Capacitors are widely used for constructing various electronic devices. Here, we report for the first time the construction of a ... View full abstract»

• ### A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom

Publication Year: 2019, Page(s):170 - 179
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Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry process. The device has a large range of motion in X, Y, and Z ( $14.1~\mu \text{m}$ in X and Y and $97.9~\mu \text{m}$ in Z) and can also rotate about two axes (7.4°), maki... View full abstract»

• ### 2019 IEEE International Reliability Physics Symposium

Publication Year: 2019, Page(s): 180
| PDF (1267 KB)
• ### Transducers 2019

Publication Year: 2019, Page(s): C3
| PDF (3775 KB)

## Aims & Scope

The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.

Full Aims & Scope

## Meet Our Editors

Editor-in-Chief
Christofer Hierold
ETH Zürich, Micro and Nanosystems