Micro touch sensor array made by hydrothermal method

We propose a micro touch sensor array, which can be used in high temperature environments. The PZT thin film was made on a Ti substrate by the hydrothermal method, and the electrodes were deposited on its surfaces to form the sensor and the actuator. The actuator part is driven at a resonance frequency of 1.045 kHz and the actuating voltage is 5V. The sensing part can detect the impedance change before and after the contact. The sensor structure is simple and easy to miniaturize and it works below high temperatures (under 82/spl deg/C). This sensor can be used as the control touch sensor pad of a car instead of the conventional capacitive type touch pad, because it can resist high temperatures. The paper reports the basic properties of the sensor.