Monolithic integration of InGaAsP MZI modulator and InGaAs driver MOSFET using III-V CMOS photonics

We monolithically integrated carrier-injection InGaAsP optical modulator and InGaAs MOSFET on III-V-on-insulator wafer. InGaAsP modulator was successfully driven directly by InGaAs driver MOSFET, exhibiting a proof-of-concept of electronic-photonic integration capability of III-V CMOS photonics platform.