Low-loss submicron Ta2O5 optical waveguide and nonlinear optical application

The low-loss and CMOS compatible Ta
₂
O
₅
based optical waveguide has been demonstrated. The quality factor of 50,000 in the Ta
₂
O
₅
micro-ring resonator is fabricated. Moreover, the four-wave-mixing has been realized in the submicron Ta
₂
O
₅
channel waveguide.