Design space of twin gate junctionless vertical slit field effect transistors

In this work, we present the technological constrains and limitations in the design of ultra-thin body Junctionless Vertical Slit Field Effect Transistor (JL VeSFET). A design space that take into account the intrinsic off-current, the sub-threshold swing and the drain induced barrier lowering is investigated with respect to key technological parameters. This work could serve as a guideline for technology optimization and design of JL VeSFETs.