Compensation of thermocouple reference junction temperature variation by a silicon temperature sensor

A new method for the reference junction temperature compensation of a K type thermocouple based thermometer by using a PTC silicon resistive sensor KTY 10 is described. The thermometer is intended for the temperature measurement in the range from 20/spl deg/C to 600/spl deg/C during plasma deposition and plasma nitriding processes, but it can be successfully used in other applications where the reference junction temperature is varied during the measurement.