Transduction of Micro‐Glassblown Wineglass Resonators

This chapter reviews three different electrode architectures for electrostatic transduction of micro‐glassblown wineglass resonators. These are: assembled electrodes for preliminary characterization of micro‐glassblown wineglass resonators, in‐plane electrodes, and out‐of‐plane electrodes. In one possible implementation of electrodes, electrostatic excitation and detection are provided by assembled electrode structures, which are fabricated separately from the micro‐glassblown resonator on a Silicon‐On‐Insulator wafer. Micro‐glassblowing process is expanded to include co‐fabrication of in‐plane electrode structures. An alternative transduction scheme relies on detection of spatial deformation of the 3‐D wineglass structure using an out‐of‐plane electrode structures. Wineglass Coriolis Vibratory Gyroscopes typically utilize eight or more electrodes to drive and sense the primary wineglass modes. One of the main challenges of fabricating micro‐wineglass resonators is the definition of electrode structures in a manner compatible with batch fabrication.